University of California

Minfeng Wang

Mark Bachman

Guann-Pyng Li

Yang Zhang

Brent Puohan Lin

Ruisheng Chang

Sungjun Kim

Sung Jun Kim

Micro-electromagnetically actuated latched miniature relay switches formed from laminate layers comprising a spring and magnet, electromagnetic coils, magnetic latching material, and transmission line with contacts. Preferably the miniature relay switches transmit up to about 50 W of DC or AC line power, and carry up to about 10 A of load current, with an overall volume of less than about 100 mm. In addition to switching large power, the device preferably requires less than 3 V to actuate, and has a latching feature that retains the switch state after actuation without the need for external applied voltage or current.

Micro electromagnetically actuated latched switches

Frequency addressable micro-actuators having one or more movable resonating elements actuators, such as cantilevers, can be forced into oscillation by, e.g., electromagnetic actuation. The movable structure is designed to latch at a certain amplitude using one of several latching techniques, such as a near-field magnetic field. In operation, the movable element is driven into resonance, producing a large amplitude, which results in the structure latching. Through resonance, a small force applied in a repeating manner can result in the latching of the actuator, an operation which would normally require a large force. If two or more units, each with different harmonic frequencies, are placed under the same influence, only the one with a harmonic response to the driving force will latch. A single influencing signal may be used to latch more than one device on demand by tuning the frequency to match the natural frequency of the device of interest.

Frequency addressable microactuators

Micro capacitive switches and methods of manufacturing micro capacitive switches at variable nominal capacitance value using micro-structures on the contact plates of the same dimension. In a preferred embodiment, a separately manufactured contact plate can be mounted to a movable magnet in order to be actuated to 'on' and 'off' state of the capacitive switch. Depending on the contact plate's surface condition, variable contact capacitance at &#x201c;on&#x201d; state can be precisely specified by geometrical properties of the micro-structures on the surface, such as the density, size and depth.

Use of micro-structured plate for controlling capacitance of mechanical capacitor switches

Magnetically actuated micro-electro-mechanical capacitor switches in laminate are disclosed. According to one embodiment, an apparatus comprises a first layer comprising a coil and magnetic element, the magnetic element made from one of nickel and iron; a second layer comprising a flexible member, wherein a permanent magnet is attached to the flexible member; a conductive plate having an insulating dielectric coating, the conductive plate attached to one of the flexible member or a magnet; and a third layer comprising a transmission line and magnetic material, wherein the transmission line comprises one or more of a signal conductor and one or more ground conductors in near proximity.

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Irvine, CA, United States of America

Minfeng Wang