Hitachi-high-technologies Corporation

Mine Araki

Mitsugu Sato

Atsushi Takane

Yasuko Aoki

Shunya Watanabe

Tetsuya Sawahata

Chisato Kamiya

Shuichi Takeuchi

Akinari Morikawa

Atsushi Muto

Atsushi Miyaki

Toru Ishitani

An object of the present invention is to provide a scanning electron microscope including decelerating-electric-field forming means for decreasing the energy of a beam of electrons reaching a sample, and being capable of selectively detecting BSEs with high efficiency. To this end, the scanning electron microscope including the decelerating-electric-field forming means has a detector for detecting electrons. The detector includes a part for receiving the electrons at a position which is positioned outside trajectories of SEs accelerated by the decelerating-electric-field forming means, and which is further away from the optical axis of the beam of electrons than the trajectories of the SEs.

Scanning electron microscope

There is disclosed a charged particle beam device which judges whether or not an image based on a dark-field signal has an appropriate atomic number contrast. Input reference information, a bright-field image or a back-scattered electron image is compared with a dark-field image, and it is judged whether or not a correlation value between them or the dark-field image has a predetermined contrast. According to such a constitution, it is possible to obtain information by which it is judged whether or not the dark-field image has an appropriate atomic number contrast.

Charged particle beam device with DF-STEM image valuation method

Growing community of inventors

Hitachinaka, Japan

Mine Araki