Konica Minolta, Inc.

Minako Ono

Kazuhiro Yoshida

Takatoshi Tsujimura

Takeshi Hakii

Toshiyuki Kinoshita

Hiroshi Ishidai

A transparent electrode comprising a nitrogen-containing layer, and an electrode layer provided adjacent to the nitrogen-containing layer and having silver as a main component. The nitrogen-containing layer is configured using a compound containing nitrogen atoms, wherein the effective unshared electron pair content [n/M] is 2.0&#xd7;10&#x2264;[n/M], n being the number of unshared electron pairs that are not involved in aromaticity and that are not coordinated with the metal from among the unshared electron pairs of the nitrogen atoms, and M being the molecular weight.

Transparent electrode, electronic device, and organic electroluminescent element

Provided is a transparent electrode having both sufficient conductivity and light transmittance, and also provided is an electronic device which improves performance by using said transparent electrode. Further provided is method of manufacturing said transparent electrode. This transparent electrode is provided with a nitrogen-containing layer and an electrode layer. The nitrogen-containing layer is formed at a deposition speed of 0.3 nm/s or greater, and is configured using a compound containing nitrogen atoms. Further, the electrode layer is provided adjacent to the nitrogen-containing layer, has a 12 nm or lower film thickness and a measurable sheet resistance, and is configured using silver or an alloy having silver as the main component.

Transparent electrode, electronic device, and transparent electrode manufacturing method

The electronic device manufacturing apparatus is provided with: a substrate holding member; a first supply source which is provided so as to move relative to the primary surface side of the substrate, and which forms a nitrogen-containing layer by supplying a nitrogen-containing compound towards the primary surface of the substrate; and a second supply source which is disposed downstream of the first supply source in the direction of movement relative to the substrate, which forms a transparent electrode layer by supplying towards the primary surface of the substrate an electrode material having silver as the main component thereof, and which is disposed such that, between starting formation and two minutes after finishing formation of the nitrogen-containing layer at a prescribed position on the substrate, formation of the transparent electrode layer is started at said prescribed position on the substrate.

Electronic device manufacturing apparatus

A transparent electrode is provided with a nitrogen-containing layer, an electrode layer having silver as the main component thereof, and an aluminum intermediate layer, wherein the aluminum intermediate layer is in contact with the nitrogen-containing layer and the electrode layer and sandwiched between the nitrogen-containing layer and the electrode layer. The nitrogen-containing layer is formed by using a compound containing a nitrogen atom. The effective unshared electron pair content [n/M] of this compound satisfies '3.9&#xd7;10&#x2266;[n/M]', where n is the number of unshared electron pair(s) not involved in aromaticity and not coordinated to metal, among unshared electron pair(s) owned by the nitrogen atom, and M is molecular weight.

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Hachioji, Japan

Minako Ono