Applied Materials, Inc.

Minab B Teferi

Frank Sinclair

Joseph C Olson

Peter F Kurunczi

Costel Biloiu

Kevin M Daniels

Jay R Wallace

Christopher W Campbell

Kevin T Ryan

A processing system may include a plasma chamber operable to generate a plasma, and an extraction assembly, arranged along a side of the plasma chamber. The extraction assembly may include an extraction plate including an extraction aperture, the extraction plate having a non-planar shape, and generating an extracted ion beam at a high angle of incidence with respect to a perpendicular to a plane of a substrate, when the plane of the substrate is arranged parallel to the side of the plasma chamber.

Apparatus and system including high angle extraction optics

Growing community of inventors

Gloucester, MA, United States of America

Minab B Teferi