Nikon Metrology Nv

Nikon Corporation

Mina A Rezk

Anthony R Slotwinski

Daniel Gene Smith

Alexander H Cooper

Eric Peter Goodwin

Thomas M Hedges

Pavel Slyusarev

Anthony Slotwinski

Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.

Low drift reference for laser radar

An optical delay between a first fiber and a second fiber is temperature compensated by combining fibers with different thermal path length changes. In some examples, fibers with different buffer coatings exhibit different path length changes per unit length and temperature. Combining such fibers in a fiber array provides a path length difference that is substantially independent of temperature.

Thermally compensated fiber interferometer assembly

Laser radar with remote local oscillator

Radar systems with dual fiber coupled lasers

Scan mirrors for laser radar

A system and method for determining a measured distance between a measuring device (A) and an object (), the system including a first laser source () for producing a first light beam (A) having a first waveform () and a first frequency; a second laser source () for producing a second light beam (IA) having a second frequency, said second light beam (HA) having a second waveform (), wherein said first frequency is chirped up at the first rate as said second frequency is chirped down at the first rate, and said second frequency is chirped up at the second rate as said first frequency is chirped down at the first rate; an optical element () for combining said first light beam (A) with said second light beam (HA) into a combined light beam path (), said optical element () splitting a returning portion of said combined light beam path () into a third light beam (); and a single detector () for receiving said third light beam () including two different beat frequencies that are proportional to the measured distance.

Compact fiber optic geometry for a counter chirp FMCW coherent laser radar

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Bristow, VA, United States of America

Mina A Rezk