Taiwan Semiconductor Manufacturing Comp. Ltd.

Min-Yuan Tsai

Wen-Ju Preet Yang

Yu-Jung Chang

Chi Wei Hu

Shu-Yi Ying

Mahantesh Hanchinal

Chin-Chang Hsu

Hung Lung Lin

Yuan-Te Hou

Chien Lin Ho

Chung-Hsing Wang

Kuo-Nan Yang

Chin-Shen Lin

Li-Sheng Ke

Nien-Yu Tsai

Jia-Rong Hsu

Hung-Lung Lin

Boundary cells may be provided. A boundary of a first functional cell of a circuit is determined. A first plurality of a first type of dummy cells are placed along a first portion of the determined boundary. The first portion extends in a first direction. Each of the first type of dummy cells comprises first pre-defined dimensions. A second plurality of a second type of dummy cells are placed along a second portion of the determined boundary. The second portion extends in a second direction. Each of the second type of dummy cells comprises second pre-defined dimensions. The second pre-defined dimensions is different than the first pre-defined dimensions.

Boundary cell

Disclosed herein are related to performing layout verification of a layout design of an integrated circuit having a slanted layout component. In one aspect, a slanted layout component having a side slanted from a base axis by an offset angle is detected. In one aspect, a first location of a vertex of the slanted layout component according to the offset angle is transformed to obtain a second location of a rotated vertex of a rotated layout component. In one aspect, layout verification is performed on the rotated layout component with respect to the base axis.

System and method of verifying slanted layout components

An IC device includes an interlayer dielectric (ILD), a first tower structure embedded in the ILD, and a first ring region including a portion of the ILD that extends around the first tower structure. The first tower structure includes a plurality of first conductive patterns in a plurality of metal layers, and a plurality of first vias between the plurality of metal layers along a thickness direction of the IC device. The plurality of first conductive patterns and the plurality of first vias are coupled to each other to form the first tower structure. The plurality of first conductive patterns is confined by the first ring region, without extending beyond the first ring region. The first tower structure is a dummy tower structure.

Integrated circuit device and method

Disclosed herein are related to performing layout verification of a layout design of an integrated circuit having a slanted layout component. In one aspect, the slanted layout component having a side slanted from a base axis is detected. In one aspect, an offset angle of the side of the slanted layout component with respect to the base axis is determined. In one aspect, the slanted layout component is rotated according to the offset angle to obtain a rotated layout component. The rotated layout component may have a rotated side in parallel with or perpendicular to the base axis. In one aspect, layout verification can be performed on the rotated layout component with respect to the base axis.

A method of manufacturing an integrated circuit includes adjusting a first spacing between an adjacent pair of routing tracks in a first set of routing tracks to be equal to a second spacing, adjusting a third spacing between an adjacent pair of routing tracks in a second set of routing tracks to be equal to a fourth spacing, placing a first and second pair of conductive patterns on the corresponding first and second set of routing tracks, forming a first set of conductive structures based on the first pair of conductive patterns, and a second set of conductive structures based on the second pair of conductive patterns. A first and second cell have a same cell height that is a non-integer multiple of a minimum pitch. One spacing of a first set of spacings is different from another spacing of the first set of spacings.

Method and layout of an integrated circuit

A method of manufacturing an integrated circuit includes generating a layout of a first and a second cell, adjusting a first spacing between an adjacent pair of routing tracks in a first set of routing tracks to be equal to a second spacing, adjusting a third spacing between an adjacent pair of routing tracks in a second set of routing tracks to be equal to a fourth spacing, placing a first pair of conductive patterns on the first set of routing tracks, placing a second pair of conductive patterns on the second set of routing tracks, forming a first set of conductive structures based on the first pair of conductive patterns, and forming a second set of conductive structures based on the second pair of conductive patterns. The first and second cell have a same cell height that is a non-integer multiple of a minimum pitch.

A method of manufacturing an integrated circuit includes identifying a first cell of a layout, placing a first pair of conductive patterns on a first set of routing tracks, placing a second pair of conductive patterns on a second set of routing tracks, and forming, by a first mask, a first set of conductive structures based on the first pair or second pair of conductive patterns. The first cell abuts a second cell. The first cell has a first set of routing tracks. The second cell has a second set of routing tracks. The first and second cell have a same cell height that is a non-integer multiple of a minimum pitch. A top and bottom boundary of the first cell overlaps a pair of the first set of routing tracks. A top and bottom boundary of the second cell overlaps a pair of the second set of routing tracks.

A method of designing a layout includes identifying a cell having a cell height being a non-integral multiple of a minimum pitch, generating, using a processor, possibilities of an ordered arrangement of a plurality of virtual grid lines parallel to the top boundary and the bottom boundary, and placing at least two conductive patterns on the plurality of virtual grid lines. The cell height is defined by a top boundary and a bottom boundary, and the minimum pitch is based on a manufacturing process. The plurality of virtual grid lines are separated from each other by a plurality of spacings, and the top boundary overlaps a first virtual grid line of the plurality of virtual grid lines and the bottom boundary overlaps a second virtual grid line of the plurality of virtual grid lines. At least one spacing is different from another spacing of the plurality of spacings.

Power grids of an IC are provided. A power grid includes first power traces disposed in a first metal layer and parallel to a first direction, second power traces disposed in a second metal layer and parallel to a second direction that is perpendicular to the first direction, and third power traces disposed in the first metal layer parallel to the first direction. The first power traces arranged in the same straight line are separated from each other by a plurality of first gaps. The third power traces arranged in the same straight line are separated from each other by a plurality of second gaps. Each first gap is surrounded by the two adjacent third power traces. Each second gap is surrounded by the two adjacent first power traces. The first power traces are coupled to the third power traces via the second power traces.

Power grid of integrated circuit

Provided is a method for evaluating and decomposing a semiconductor device level for triple pattern lithography in semiconductor manufacturing. The method includes generating a conflict graph and simplifying the conflict graph using various methods to produce a simplified conflict graph which can either be further simplified or evaluated for decomposition validity. The disclosure also provides for applying decomposition validity rules to a simplified conflict graph to determine if the conflict graph represents a semiconductor device layer that is decomposable into three masks. Methods of the disclosure are carried out by a computer and instructions for carrying out the method may be stored on a computer readable storage medium.

Triple-pattern lithography layout decomposition

A method of decomposing a layout for triple pattern lithography generates a first conflict graph from the layout. The method generates a second conflict graph from the first conflict graph, and identifies loops in the second conflict graph as decomposition violations.

Triple-pattern lithography layout decomposition validation

A method embodiment includes identifying an empty region in an integrated circuit (IC) layout, wherein the empty region is a region not including any active fins and outside a minimum spacing boundary, applying a grid map over the empty region, wherein the grid map comprises a plurality of grids inside the empty region, and filling the empty region with a plurality of dummy fin cells by placing a dummy fin cell in each of the plurality of grids, wherein applying the grid map and filling the empty region is performed using a computer.

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Zhubei, Taiwan

Min-Yuan Tsai