Samsung Electronics Co., Ltd.

Min Whoa Hong

Jung Hun Lee

Sung Hee Lee

Taejoong Kim

Sun Key Lee

Jongsu Kim

Sungha Kim

Kijoo Hong

Doohyun Cho

Youngsu Ryu

Kwangsung Lee

Tae Hun Lim

Wansung Park

Jaeyoun Wi

Hyun Kee Min

Choun Jong Nam

A thickness estimation method may include: obtaining a test spectrum image; obtaining test spectrum data; measuring a thickness of a test layer formed on the test substrate at the plurality of positions; generating a regression analysis model using a correlation between the thickness of the test layer and the test spectrum data; obtaining a spectrum image; and estimating a thickness of a target layer over the entire area of the semiconductor substrate by applying the spectrum image to the regression analysis model. The thickness corresponding to the entire area of the semiconductor substrate that is being transferred is estimated using the thickness estimation method according to an exemplary embodiment in the present disclosure, such that whether or not processing is normally performed may be examined without requiring a separate time. In addition, an examination result may be feedbacked to processing equipment to improve production yield.

Thickness estimation method and processing control method

Disclosed is an electronic device comprising: a touch screen display; a battery; a plurality of antenna elements arranged in order to perform beamforming for directional wireless communication; a first wireless communication circuit configured to provide, through the antenna elements, first wireless communication having a first coverage; a second wireless communication circuit configured to provide second wireless communication having a second coverage greater than the first coverage; and a processor connected to the display, the battery, the first wireless communication circuit, and the second wireless communication circuit, wherein the processor stores instructions for determining whether an external device is close to the electronic device by using the first wireless communication circuit, enabling at least one antenna element, rather than all the antenna elements, among the plurality of antenna elements, and transmitting data to the external device by using the second wireless communication circuit and the enabled at least one antenna element.

Electronic device for performing beamforming in wireless communication system and method therefor

Growing community of inventors

Suwon-si, South Korea

Min Whoa Hong