Samsung Electronics Co., Ltd.

Min-Sung Song

Jae-Hwang Sim

Soon-Moon Jung

Joon-Sung Lim

Won-Seok Cho

Young-Chul Jang

Yang-Soo Son

Han-Soo Kim

Jae-Hoon Jang

Keon-Soo Kim

Wonseok Cho

Jonghyuk Kim

Kyung-Hoon Min

YoungSeop Rah

Jang Young Chul

Yeon-Wook Jung

Young-Ho Lee

Jong-Hyuk Kim

Jin-hyun Shin

Yoon-Moon Park

Bong-Hyun Choi

Young-Seop Rah

The inventive concepts provide methods for fabricating a semiconductor device and semiconductor devices fabricated by the same. According to the method, conductive lines having a fine pitch smaller than the minimum pitch realized by an exposure process may be formed using two or three photolithography processes and two spacer formation processes. In addition, node separation regions of the conductive lines may be easily formed without a misalignment problem.

Methods for fabricating a semiconductor device and semiconductor devices fabricated by the same

Methods of fabricating semiconductor devices may include forming a stopper layer, a lower hard mask layer, an intermediate hard mask layer, and an upper hard mask pattern on a substrate, forming first spacer patterns on sidewalls of the upper hard mask pattern, selectively etching the intermediate hard mask layer using the first spacer patterns as an etching mask, forming second spacer patterns on sidewalls of the etched intermediate hard mask layer, selectively etching the lower hard mask layer using the etched second spacer layer as an etching mask, forming a patterning mask pattern that exposes a cell area and covers a common source line area on the etched lower hard mask layer and the stopper layer, and selectively etching the stopper layer using the etched lower hard mask layer and the patterning mask pattern as etching masks to form stopper patterns.

Methods of fabricating semiconductor devices including multiple patterning

In a method of manufacturing a semiconductor device, which uses a triple patterning process, a porous layer covering sidewalls and an upper surface of a polymer-containing pattern is formed on a layer to be etched. A decomposition gas is supplied to the polymer-containing pattern through the porous layer, and a portion of the polymer-containing pattern is decomposed to form a reduced polymer-containing pattern and form a void between the reduced polymer-containing pattern and the porous layer. A portion of the porous layer is removed to form a porous spacer pattern spaced apart from the reduced polymer-containing pattern. The layer to be etched is etched by using the reduced polymer-containing pattern and the porous spacer pattern as an etch mask.

Method of manufacturing semiconductor device

In a non-volatile memory device and method of manufacturing the same, a device isolation pattern and an active region extend in a first direction on a substrate. A first dielectric pattern is formed on the active region of the substrate. Conductive stack structures are arranged on the first dielectric pattern and a recess is formed between a pair of the adjacent conductive stack structures. A protection layer is formed on a sidewall of the stack structure to protect the sidewall of the stack structure from over-etching along the first direction. The protection layer includes an etch-proof layer having oxide and arranged on a sidewall of the floating gate electrode and a sidewall of the control gate line and a spacer layer covering the sidewall of the conductive stack structures.

Nonvolatile memory device and method of manufacturing the same

Method of manufacturing nonvolatile memory device

A semiconductor device includes a semiconductor substrate including a first region having a cell region and a second region having a peripheral circuit region, first transistors on the semiconductor substrate, a first protective layer covering the first transistors, a first insulation layer on the first protective layer, a semiconductor pattern on the first insulation layer in the first region, second transistors on the semiconductor pattern, a second protective layer covering the second transistors, the second protective layer having a thickness greater than that of the first protective layer, and a second insulation layer on the second protective layer and the first insulation layer of the second region.

Method for forming semiconductor device having metallization comprising select lines, bit lines and word lines

On embodiment of a contact structure may include a lower insulation layer on a lower substrate, an upper substrate on the lower insulation layer, a groove penetrating the upper substrate to extend into the lower insulation layer, the groove below an interface between the upper substrate and the lower insulation layer, an upper insulation layer in the groove, and a contact plug penetrating the upper insulation layer in the groove to extend into the lower insulation layer.

Contact structures in substrate having bonded interface, semiconductor device including the same, methods of fabricating the same

In multiple-layered memory devices, memory systems employing the same, and methods of forming such devices, a second memory device layer on a first memory device layer comprises a second substrate including a second memory cell region. The second substrate includes only a single well in the second memory cell region, the single well of the second memory cell region comprising a semiconducting material doped with impurity of one of a first type and second type. The single well defines an active region in the second memory cell region of the second substrate. Multiple second cell strings are arranged on the second substrate in the second active region. Although the second memory cell region includes only a single well, during a programming or erase operation of the memory cells of the second layer, requiring a high voltage to be applied to the single well in the substrate of the second layer, the high voltage will not interfere with the operation of the peripheral transistors of the first layer, second layer, or other layers, since they are isolated from each other. As a result, the substrate of the second layer can be prepared to have a thinner profile, and with fewer processing steps, resulting in devices with higher-density, greater reliability, and reduced fabrication costs.

Multiple-layer non-volatile memory devices, memory systems employing such devices, and methods of fabrication thereof

A method of fabricating a semiconductor device facilitates the forming of a conductive pattern of features having different widths. A conductive layer is formed on a substrate, and a mask layer is formed on the conductive layer. First spaced apart patterns are formed on the mask layer and a second pattern including first and second parallel portion is formed beside the first patterns on the mask layer. First auxiliary masks are formed over ends of the first patterns, respectively, and a second auxiliary mask is formed over the second pattern as spanning the first and second portions of the second pattern. The mask layer is then etched to form first mask patterns below the first patterns and a second mask pattern below the second pattern. The first and second patterns and the first and second auxiliary masks are removed. The conductive layer is then etched using the first and second mask patterns as an etch mask.

Method of fabricating semiconductor device

Semiconductor memory device having metallization comprising select lines, bit lines and word lines

Growing community of inventors

Hwaseong-si, South Korea

Min-Sung Song