Samsung Electro-mechanics Co., Ltd.

Korea Electronics Technology Institute

Min-Suk Oh

Sang Kyeong Yun

Jong-Hyeong Song

Seung-Do An

Byung-Wook Yoo

Jeong-Min Yi

Chul-Jong Han

Ji-Yong Kim

Disclosed is a diffractive micromirror and a method of producing the same. More particularly, the present invention pertains to a diffractive thin-film piezoelectric micromirror, which is operated in a piezoelectric operation manner to assure excellent displacement, operation speed, reliability, linearity, and low voltage operation, and a method of producing the same. The diffractive thin-film piezoelectric micromirror includes a silicon substrate on which a recess is formed to provide an air space to the center thereof, and a piezoelectric mirror layer having a band shape, which is attached to the silicon substrate along both ends of the recess at both ends thereof while being spaced from the bottom of the recess at a center portion thereof and which includes a thin-film piezoelectric material layer to be vertically movable when voltage is applied to the piezoelectric material layer, and thus diffracts an incident light beam.

Diffractive thin-film piezoelectric micromirror and method of producing the same

Growing community of inventors

Seoul, South Korea

Min-Suk Oh