Average Co-Inventor Count = 6.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Electronics Co., Ltd. (2 from 131,766 patents)
2 patents:
1. 12456603 - Substrate processing apparatus, signal source device, method of processing material layer, and method of fabricating semiconductor device
2. 11569065 - Substrate processing apparatus, signal source device, method of processing material layer, and method of fabricating semiconductor device