Samsung Electronics Co., Ltd.

Min Kyun Lee

Sangmin Kim

Sangkyung Lee

Yong-Jun Ahn

Hyunwoo Lee

Youngwook Kim

Hyunjae Kang

Chul-Jun Park

Gi-Nam Park

Jeonghun Lim

Kyubum Cho

Sanga Bang

Geunhyung Kim

JongJin Ahn

Seunggyu Kang

According to an embodiment, a cassette storage case includes a body defining an internal storage space for a cassette. The body includes a lower body part, and a shield body part extending upward from an upper surface outer region of the lower body part. The shield body part has an opening in an upper portion thereof. A load protruding portion extends outward from an outer bottom surface of the lower body part, and has a shape that corresponds to a shape of the opening.

Cassette storage case and cassette management system including the same

A measurement carrier includes a housing having an internal space, and a flow-rate measuring device located within the internal space. A bottom surface of the housing includes a first inflow hole, a second inflow hole, and an outflow hole, which provide fluid communication between the internal space and an outer space. The flow-rate measuring device may include a first flow-rate measuring sensor in fluid communication with the first inflow hole, and a second flow-rate measuring sensor in fluid communication with the second inflow hole.

Carrier for measurement and wafer transfer system including the same

Growing community of inventors

Suwon-si, South Korea

Min Kyun Lee