Semes Co., Ltd.

Min Je Lee

Tae Kyung Kong

Ki Won Han

An apparatus for transferring a substrate includes a hand on which the substrate is placed, and the hand includes an outer support member that supports a first region of the substrate and has a pair of outer fingers, an inner support member that supports a second region of the substrate that is closer to the center of the substrate than the first region, the inner support member having a pair of inner fingers located inward of the pair of outer fingers, and a central recess formed in a region between the pair of inner fingers of the inner support member, the region corresponding to the center of the substrate placed on the hand and the central recess being open toward a front side.

Growing community of inventors

Daegu, South Korea

Min Je Lee