Samsung Display Co., Ltd.

Samsung Mobile Display Co., Ltd.

Min-Jae Jeong

Ki-Yong Lee

Yun-Mo Chung

Dong-Hyun Lee

Jin-Wook Seo

Byoung-Keon Park

Jong-Ryuk Park

Kil-Won Lee

Byung-Soo So

Jae-Wan Jung

Seung-Kyu Park

Yong-Duck Son

Tak-Young Lee

Jong-Won Hong

Heung-Yeol Na

Seok-Rak Chang

Eu-Gene Kang

Tae-Hoon Yang

Bo-Kyung Choi

Ivan Maidanchuk

Young-Dae Kim

Ji-Su Ahn

Won-Bong Baek

Keum-Nam Kim

Sang-Yon Yoon

Chong-Chul Chai

Joon-Hoo Choi

Dae-Woo Lee

Gyung-Soon Park

Maxim Lisachenko

Kyung-Hoon Chung

Sang-Hyun Yun

Hyun-Woo Koo

Kii-Won Lee

Jae-Yong Jang

Ki-Young Lee

A display apparatus includes a base substrate including a display region and a peripheral region that is a non-display region surrounding the display region, a plurality of data lines disposed in the display region on the base substrate and extending to the peripheral region, a bypass data line disposed in the display region and the peripheral region on the base substrate and electrically connected to at least one of the data lines, and a dummy pattern spaced apart from the bypass data line and disposed on a same layer as the bypass data line.

Display apparatus having an improved display quality and a reduced peripheral (non-display) region for use in electronic device having a bypass data line arranged in the display and peripheral regions

An organic light emitting display device may include a substrate having a pixel region and a transparent region, a first capacitor disposed in the transparent region of the substrate, a semiconductor device disposed in the pixel region of the substrate, a second capacitor disposed on the semiconductor device, and an organic light emitting structure disposed on the second capacitor. The organic light emitting display device may have a sufficient capacitance for components including the semiconductor device and the organic light emitting structure without increasing an area of the pixel region while maintaining a transmittance of the organic light emitting display device.

Organic light emitting display devices and methods of manufacturing organic light emitting display devices

An organic light emitting display device includes a substrate a plurality of pixels disposed along a first direction and a second direction, the first direction and the second direction being substantially parallel to a top surface of the substrate and substantially perpendicular to each other, first wirings which is disposed on the substrate, extends in the first direction, and includes a first low voltage power line, and second wirings which is disposed on the substrate, extends in the second direction, and includes a second low voltage power line electrically connected to the first low voltage power line.

Organic light emitting display device

A method of forming a polycrystalline silicon layer includes forming a first amorphous silicon layer and forming a second amorphous silicon layer such that the first amorphous silicon layer and the second amorphous silicon layer have different film qualities from each other, and crystallizing the first amorphous silicon layer and the second amorphous silicon layer using a metal catalyst to form a first polycrystalline silicon layer and a second polycrystalline silicon layer. A thin film transistor includes the polycrystalline silicon layer formed by the method and an organic light emitting device includes the thin film transistor.

Thin film transistor and organic light emitting device including polycrystalline silicon layer

A separated target apparatus includes a base plate; and a plurality of source units including a plurality of separated targets that are adhered on one surface of the base plate and that form a regular array, and a plurality of magnets that are adhered on the other surface of the base plate and that make a pair with the plurality of separated targets. The plurality of source units are arrayed in parallel at an angle between a first direction that is a direction of the regular array and a second direction that is perpendicular to the first direction. Sputtering is performed by using the separated target apparatus having the aforementioned structure.

Separated target apparatus for sputtering and sputtering method using the same

A thin film transistor including a first polycrystalline semiconductor layer disposed on a substrate, a second polycrystalline semiconductor layer disposed on the first polycrystalline semiconductor layer, and metal catalysts configured to adjoin the first polycrystalline semiconductor layer and spaced apart from one another at specific intervals.

Thin film transistor, method of manufacturing active layers of the thin film transistor, and display device

Provided is a sputtering apparatus which deposits a metal catalyst on an amorphous silicon layer at an extremely low concentration in order to crystallize amorphous silicon, and particularly minimizes non-uniformity of the metal catalyst caused by a pre-sputtering process without reducing process efficiency. This sputtering apparatus improves the uniformity of the metal catalyst deposited on the amorphous silicon layer at an extremely low concentration. The sputtering apparatus includes a process chamber having first and second regions, a metal target located inside the process chamber, a target transfer unit moving the metal target and having a first shield for controlling a traveling direction of a metal catalyst discharged from the metal target, and a substrate holder disposed in the second region to be capable of facing the metal target. A distance difference between a linear distance, which is a distance between a substrate loaded on the substrate holder and the metal target, and a length of the first shield is less than 3 cm.

Sputtering apparatus

A display device including: a substrate; a first semiconductor layer disposed on the substrate; a second semiconductor layer disposed on the substrate and adjacent to the first semiconductor layer; a first insulation layer disposed on both the first semiconductor layer and the second semiconductor layer, the first insulation layer including a first opening forming a space between the first semiconductor layer and the second semiconductor layer; and a second insulation layer disposed on the first insulation layer and that fills the first opening.

Display device and method of manufacturing the same

A magnetron unit moving apparatus for preventing magnetization and magnetron sputtering equipment having the same. The magnetron unit moving apparatus includes a magnetron unit disposed adjacent to a target, to generate a specific magnetic field, and a movement unit to space the magnetron unit and the target apart such that a strength of a magnetic field generated over the target is within a predetermined reference strength range. It is possible to space the target and the magnetron unit apart so as to prevent the target from being magnetized when a process is not performed.

Magnetron unit moving apparatus for preventing magnetization and magnetron sputtering equipment having the same

Method of forming polycrystalline silicon layer, and thin film transistor and organic light emitting device including the polycrystalline silicon layer

A substrate processing apparatus includes a heating unit that heats a processing chamber that processes a plurality of substrates and that quickly cools the processing chamber after the processing. The heating unit includes a body having an intake port and an exhaust port, one or more heaters located inside the body, a cooler connected to the intake port of the body, an exhaust pump connected to the exhaust port of the body, and a controller controlling the cooler. The substrate processing apparatus includes a boat in which a plurality of substrates are stacked, a processing chamber providing a space in which the substrates are processed, a transfer unit carrying the boat into or out of the processing chamber, and the heating unit located outside the processing chamber.

Heating unit and substrate processing apparatus having the same

A substrate processing apparatus that forms thin films on a plurality of substrates and thermally processes the substrates, by uniformly heating the substrates. The substrate processing apparatus includes a processing chamber, a boat in which substrates are stacked, an external heater located outside of the processing chamber, a feeder to move the boat into and out of the processing chamber, a lower heater located below the feeder, and a central heater located in the center of the boat.

Substrate processing apparatus

A thin film transistor including: an active layer formed on a substrate; a gate insulating layer pattern formed on a predetermined region of the active layer; a gate electrode formed on a predetermined region of the gate insulating layer pattern; an etching preventing layer pattern covering the gate insulating layer pattern and the gate electrode; and a source member and a drain member formed on the active layer and the etching preventing layer pattern.

Thin film transistor, display device thereof, and manufacturing method thereof

A substrate including a thin film transistor, the substrate including an active layer disposed on the substrate, the active layer including a channel area and source and drain areas, a gate electrode disposed on the active layer, the channel area corresponding to the gate electrode, a gate insulating layer interposed between the active layer and the gate electrode, an interlayer insulating layer disposed to cover the active layer and the gate electrode, the interlayer insulating layer having first and second contact holes partially exposing the active layer, source and drain electrodes disposed on the interlayer insulating layer, the source and drain areas corresponding to the source and drain electrodes, and ohmic contact layers, the ohmic contact layers being interposed between the interlayer insulating layer and the source and drain electrodes, and contacting the source and drain areas through the first and second contact holes.

Method of manufacturing substrate including thin film transistor

Growing community of inventors

Yongin, South Korea

Min-Jae Jeong