Samsung Electronics Co., Ltd.

Skhynix Inc.

Seoul National University

Min-Cheol Kang

Sung-Eun Park

Jaehoon Kim

Hyung-Hwan Kim

Sooryong Lee

Do-Nyun Kim

Seung-Seok Pyo

Seong-Su Lim

Kihyun Kim

Woo-Young Choi

Soo Yong Lee

Hyun-Woo Park

Jaewon Yang

Sung-Ik Park

Sang Chul Yeo

Seung Hune Yang

Woojoo Sim

Kyen-hee Lee

Chan-Hee Yoon

Byung-Il Han

Seung-Yeol Lee

Jee Yong Lee

U Seong Kim

Jaekyung Lim

Dong Hoon Kuk

Yongjin Chun

Disclosed is an operating method of an electronic device which includes a processor and supports manufacture of a semiconductor device. The operating method includes receiving, at the processor, a layout image for the manufacture of the semiconductor device and a captured image generated by capturing the semiconductor device actually manufactured, aligning, at the processor, the layout image and the captured image based on a result of emphasizing edges and corners of the layout image and the captured image, and performing, at the processor, learning based on the aligned layout image and the aligned captured image such that a first modified layout image is generated from the layout image, and the semiconductor device is manufactured based on a second modified layout image generated from the layout image.

Electronic device supporting manufacture of semiconductor device and operating method of electronic device

Disclosed is a semiconductor integrated circuit fabricating method of a semiconductor fabricating device which includes a processor executing a defect detection module includes receiving, at the defect detection module, a first capture image of the semiconductor integrated circuit and a first layout image, generating, at the defect detection module, a second layout image from the first capture image, generating, at the defect detection module, a contour image from the first capture image and the second layout image, detecting, at the defect detection module, a defect of the semiconductor integrated circuit based on the first layout image and the contour image, analyzing, at the semiconductor fabricating device, a correlation between a kind of the defect and process variations of the semiconductor integrated circuit, and changing, at the semiconductor fabricating device, at least one process variation having a correlation with the defect from among the process variations.

Electronic device including processor executing defect detection module, operating method of electronic device, and method for fabricating semiconductor integrated circuit

Disclosed are a method of forming an optical proximity correction (OPC) model and/or a method of fabricating a semiconductor device using the same. The method of forming the OPC model may include obtaining a scanning electron microscope (SEM) image, which is an average image of a plurality of images taken using one or more scanning electron microscopes, and a graphic data system (GDS) image, which is obtained by imaging a designed layout, aligning the SEM image and the GDS image, performing an image filtering process on the SEM image, extracting a contour from the SEM image, and verifying the contour. The verifying of the contour may be performed using a genetic algorithm. Variables in the genetic algorithm may include first parameters related to the image alignment process, second parameters related to the image filtering process, and third parameters related to a critical dimension (CD) measurement process.

Method of forming optical proximity correction model and method of fabricating semiconductor device using the same

Disclosed is an operating method of an electronic device for manufacture of a semiconductor device. The method includes receiving, at the electronic device, a computer-aided design (CAD) image for a lithography process of the semiconductor device, and generating, at the electronic device, a first scanning electron microscope (SEM) image and a first segment (SEG) image from the CAD image by using a machine learning-based module, and the first SEG image includes information about a location of a defect.

Method, electronic device and operating method of electronic device and manufacture of semiconductor device

Disclosed is a wafer defect inference system, which includes a test equipment that receives a first image obtained by imaging circuit patterns formed on a semiconductor wafer by using a scanning electron microscope and a second image obtained by imaging a layout image of a mask for implementing the circuit pattern on the semiconductor wafer and combines the first image and the second image to generate a combination image, and at least one computing device that is capable of communicating with the test equipment and infers a defect associated with the circuit pattern formed on the semiconductor wafer. The computing device receives the combination image, performs machine learning for inferring the defect based on the combination image, and generates an output image including information about the defect based on the machine learning.

Device and method for detecting defects on wafer

A method of manufacturing a semiconductor device that includes providing a substrate having a pattern formed thereon. A scanning electron microscope (SEM) image is generated that includes a boundary image showing an edge of the pattern. A blended image is generated by performing at least one blending operation on the SEM image and a background image aligned with the boundary image. Contour data is generated by binarizing the blended image on a basis of a threshold value. The threshold value is determined by a critical dimension of the pattern.

Pattern analysis system and method of manufacturing semiconductor device using the same

A process proximity correction method is performed by a process proximity correction computing device which performs a process proximity correction (PPC) through at least one of a plurality of processors. The process proximity correction method includes: converting a target layout including a plurality of patterns into an image, zooming-in or zooming-out the image at a plurality of magnifications to generate a plurality of input channels, receiving the plurality of input channels and performing machine learning to predict an after-cleaning image (ACI), comparing the predicted after-cleaning image with a target value to generate an after-cleaning image error, and adjusting the target layout on the basis of the after-cleaning image error.

Process proximity correction method and the computing device for the same

An apparatus and method for storing an image in a storage folder corresponding to a file name in a mobile device are provided. The method includes obtaining a keyword list by analyzing a file name of the data to be stored, searching for at least one storage folder having a folder name corresponding to at least one keyword included in the keyword list, determining one of the found storage folders, and storing the data in the determined storage folder.

Method and apparatus for storing data in mobile terminal

A mobile communication terminal for providing a Radio Frequency IDentification (RFID) service interworking with video telephony and a method thereof are provided. The mobile communication system includes a first mobile communication terminal for generating RFID service information by using RFID tag information and for transmitting the generated information to a second mobile communication terminal, and the second mobile communication terminal for parsing the RFID service information received from the first mobile communication terminal and for outputting the parsed RFID service information.

Mobile communication terminal for providing radio frequency identification service interworking with video telephony and method thereof

A semiconductor device includes a plurality of first conductive patterns separated by a damascene pattern, a second conductive pattern buried in the damascene pattern, and a spacer including an air gap between the second conductive pattern and the first conductive patterns.

Semiconductor device and method for fabricating the same

An apparatus and a method for casting video and audio data to a web during video telephony in a mobile communication terminal are provided. The method includes sending a transmitting request message to a counterpart terminal, if a transmitting request menu is selected in a video telephony mode, sending authentication information to a server, if a transmitting accept message is received from the counterpart terminal, and transmitting video telephony data to the server, if an authentication complete message is received from the server.

Growing community of inventors

Suwon-si, South Korea

Min-Cheol Kang