USA As Represented by Secretary of the Navy

Geo-centers, Inc.

Geo-center, Inc.

Milton L Rebbert

Martin C Peckerar

Jeffrey M Calvert

Jacque H Georger, Jr

James J Hickman

Jacqueline Fischer

Julius Grossman

Charles J Taylor

Howard A Smith

High aspect ratio metal microstructures may be prepared by a method involving

High aspect ratio metal microstructures and method for preparing the same

A method of fabricating a free-standing wire mesh grid pattern having a sth, flat surface is disclosed. A thermal oxide is selectively applied to front and back sides of a silicon substrate. A central portion of the oxide on the back side is removed. A resist layer is applied onto the oxide on the front side of the substrate. A resist mesh pattern with a border encompassing that resist mesh pattern is lithographically developed on the resist layer. Chrome and gold layers are sequentially deposited onto the border and into the resist mesh pattern to create a wire mesh pattern within the resist mesh pattern. The resist layer, including the developed resist mesh pattern, is removed to expose the wire mesh pattern from the front side of the substrate. A nickel layer is deposited over the gold layer to develop a wider wire mesh pattern. A second gold layer is then deposited over the nickel layer to form a wire mesh grid pattern composed of chrome, gold, nickel and gold layers. Central portions of the substrate and the oxide on the front side of the substrate are removed to expose the wire mesh grid pattern from the back side of the substrate. Finally, the chrome layer is removed to produce the desired free-standing wire mesh grid pattern supported by the encompassing metal-clad border.

Method for fabricating thin film metallic meshes for use as Fabry-Perot

Growing community of inventors

Elkridge, MD, United States of America

Milton L Rebbert