Kla Corporation

Million Daniel

Anatoly Romanovsky

Steve Yifeng Cui

Mandar Paranjape

Nadine Asenbaum-Doerre

Jeff Chen

A laser-beam power-modulation system includes an acousto-optic modulator (AOM) to receive a laser beam and separate the laser beam into a primary beam and a plurality of diffracted beams based on an input signal. The power of the primary beam depends on the input signal. The system also includes a slit to transmit the primary beam and dump the plurality of diffracted beams, a controller to generate a control signal based at least in part on feedback indicative of the power of the primary beam or the power of a beam generated using the primary beam, and a driver to generate the input signal based at least in part on the control signal.

Growing community of inventors

Milpitas, CA, United States of America

Million Daniel