Murata Manufacturing Co., Ltd.

Mikko Partanen

Anssi Blomqvist

Ville-Pekka Rytkönen

Petteri Kilpinen

A micromechanical device further comprises a motion limiter configured to prevent a rotor from coming into direct physical contact with a stator. The motion limiter comprises a spring which extends across the rotor-stator gap. The motion limiter further comprises a stopper which is attached to the spring. When the rotor moves toward the stator, the motion limiter is configured to bring the stopper into contact with a counter-structure.

Low-impact motion limiter

This disclosure describes a micromechanical device comprising a first device part and a second device part. One of the first and second device parts is a mobile rotor and the other of the first and second device parts is a fixed stator. The micromechanical device further comprises a motion limiter which extends from the first device part to the second device part. The motion limiter comprises an elongated lever, and the motion limiter is configured to bring a stopper into contact with a counter-structure by rotating the elongated lever.

Early-impact motion limiter for MEMS device

A gyroscope with a first Coriolis mass quartet and a second Coriolis mass quartet arranged around two quartet center points, and two elongated mass elements or synchronization bars aligned with each other outside of each Coriolis mass. One end of each elongated mass element and synchronization bar is attached to the corresponding Coriolis mass. Each elongated mass element is suspended from a peripheral anchor point by a mass element suspension arrangement which allows said elongated mass element to undergo rotational motion both in the device plane and out of the device plane. Each elongated synchronization bar is suspended from a peripheral anchor point by a synchronization bar suspension arrangement which allows said elongated synchronization bar to undergo rotational motion both in the device plane and out of the device plane substantially around its midpoint.

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Vantaa, Finland

Mikko Partanen