Canon Kabushiki Kaisha

Mikio Sato

Shinji Wakui

Katsumi Asada

Hiroaki Takeishi

Masahiro Morisada

Shinji Shinnaka

A linear motor apparatus which drives a mover of a linear motor in a stable manner, by using only information on change of relative position, without using an absolute value sensor. The apparatus has a coil array of plural phases of coils and a magnet relatively movable to the coil array, plural drivers, at least one of which being provided for each phase, to feed a current to all the same phase coils of the coil array, a sensor for measuring a change of relative position of the magnet moved by the current to the coil array, and a controller to determine the polarity of the current applied to the same phase coils based on the change of the relative position measured by the sensor, and apply a drive current to drive the magnet in a desired direction to the same phase coils.

Linear motor apparatus

A stage apparatus includes a stage, a member fixed to the stage and a weight compensation mechanism having at least three spring members for compensating for a weight of a structure including the stage and the member. A barycentric position of the structure deviates from a centroid of a polygon formed by support points of the at least three spring members. The spring constants of the at least three spring members are based on a relative positional relationship between the barycentric position of the structure and the at least three spring members so as to set at least one spring constant different from the other spring constants.

Stage apparatus, exposure apparatus, and device manufacturing method

A target state quantity generating unit generates a target state quantity for a stage, and a laser interferometer detects the current state quantity (position) of the stage. Based on the target state quantity and the detected state quantity (position), a compensation system constituted by a variable phase compensator and a PID compensator controls the driving operation of the stage. A memory unit stores forward and reverse gain tables, and provides adjustment information for adjusting the compensation system in correspondence with the state quantity of the stage. The corresponding gain table is selected on the basis of the driving direction of the stage, and the adjustment information is read out from the selected gain table on the basis of the position of the stage. The corner frequency of the variable phase compensator is changed on the basis of the readout adjustment information.

Drive control apparatus

Provided is high-performance H.sub..infin. control technology suitable for position control or speed control of semiconductor exposure apparatus, servo writer of hard disk, etc. A series compensator in the classical control technology represented by the PID compensator is employed as a frequency weight of loop shaping, whereby the design technology in the conventional classical control can be succeeded to and a high-performance control system can be realized even for cases where there is an oscillation mode of a controlled object to become a problem on control performance in the servo band, which was difficult to realize by the classical control technology. Also, using a robust stabilizing compensator obtained from a generalized plant having constant matrix weights, a high-performance control system can be realized even for cases where there is an oscillation mode of the controlled object to become a problem on control performance in the servo band, which was difficult to realize by the conventional classical control technology.

Control apparatus, a stage apparatus and a hard disk servo writer

A precision positioning apparatus suitable for the positioning control system of a semiconductor exposing apparatus such as a stepper has, as its object, the provision of a non-contact type precision positioning apparatus capable of properly correcting the disturbance of posture or vibration based on low rigidityy which is a feature of a non-contact guide mechanism and accomplishing stable, highly accurate positioning at a high speed. The precision positioning apparatus is provided with a base plate, a movable member positioned on the base plate, a driving device for driving the movable member, a detecting device for detecting movement of the movable member, and a device for supplying the driving device with a signal regarding the movement of the movable member on the basis of a reference value and the output value from the detecting device. The supplying device includes a device for forming a correction signal for substantially negating a disturbance force to the movable member, by the use of the signal supplied to the driving device and the output from the detecting device. The signal supplied to the driving device can be corrected by the correction signal.

Precision positioning apparatus

A stage driving system capable of positioning an object with a higher speed and a higher precision than prior systems. The system includes a base member, plural movable members provided on the base member, and a controller for controlling the plural movable members so as to substantially suppress the vibration of the base member caused by the displacements of the plural movable members.

Stage driving system

In an adaptive apparatus for adaptively adjusting parameters in a system, the parameters of the system are adjusted in accordance with an integral relationship. At that moment, one or both of a scalar and a matrix which depend on time are used as gains. Furthermore, adjustment in accordance with a proportional relationship is used together. Also in this adjustment, one or both of a scalar and a matrix which depend on time are used as gains.

Adaptive apparatus

In apparatus for recording information and/or reproducing information by irradiating a light beam to a disk shaped optical recording medium, there are provided an adjusting mechanism for adjusting an irradiation state of the light beam to the recording medium, a detector for detecting an irradiation sate error signal of the light beam transmitted or reflected from the recording medium to the recording medium. Further, there are provided a feedback circuit, a storing device and providing circuit. In the feedback circuit, the irradiation state error signal obtained by the detector is sampled at a predetermined rate to generate a control signal for the adjusting mechanism by use of the sampled irradiation state error signal, and the control signal is fed back to the adjusting mechanism. The sampling of the irradiation state error signal is effected at a different rate from that in the detector and the sampled irradiation state error signal is stored in the storing device. The irradiation state error signal stored in the device is input to the feedback circuit by the providing circuit.

Growing community of inventors

Tochigi, Japan

Mikio Sato