Jeol Ltd.

Sii Nanotechnology Inc.

Protein Engineering Research Institute

Mikio Naruse

Toshiaki Fujii

Toru Kasai

Eiichi Watanabe

Toshikatsu Kaneyama

Tatsuya Adachi

Yoshinori Fujiyoshi

Toshikazu Honda

Tadanori Yoshioka

Masashi Iwatsuki

Ikuya Nishimura

Yu Ishibashi

Mike Hassel Shearer

Harumi Kihara

The problem of the present invention is to provide a TEM sample equipped with an identifying function for easily specifying a detailed TEM sample and to provide a system for handling the management of information relating to the TEM sample using the TEM when making observations that is constructed with the FIB device manufacturing the sample. The TEM sample of the present invention is written with a mark encoding information specifying the sample at a specified location of a peripheral part. Information relating to the sample filed taking sample specifying information as an index is supplied to a TEM as associated matter. The sample working FIB device and observation TEM device of the present invention are provided with a function enabling writing of information relating to the sample and images to the file during operation which is then read out and utilized on a display.

TEM sample equipped with an identifying function, focused ion beam device for processing TEM sample, and transmission electron microscope

A method and apparatus for preparing a specimen adapted for electron microscopy comprises an evacuated specimen-processing chamber. A specimen having a surface to be processed is placed inside the processing chamber A beam-blocking member is placed close to the processed surface so as to block a part of an etching beam A first etching step is performed by directing the beam at the specimen via the blocking member. Then, the specimen and the blocking member are moved relative to each other. Finally, a second etching step is performed by directing the beam at the specimen via the blocking member. As a result, the specimen becomes a thin film and it can be observed with the electron microscope.

Method and apparatus for preparing specimen

There is disclosed a simple specimen-holding device for use with an electron microscope. The device comprises a pair of films which transmit the electron beam. The films are reinforced with a network of reinforcing members and placed on a specimen stage. A specimen to be investigated is held in a thin space formed between the films, together with moisture. The fringes of the films are compressed together to hermetically isolate the space between the films from the specimen chamber of the microscope which is evacuated. The electron beam passes through the thin space sandwiched between the films. This permits the specimen to be observed in an almost unmodified state with little damage to the specimen.

Specimen-holding device for electron microscope

An electron microscope capable of performing accurate X-ray analysis. A specimen stage on which a specimen to be investigated is placed, is disposed between the upper and lower magnetic pole pieces of the objective lens. The specimen is irradiated with the electron beam to detect X-rays emitted from the specimen. The specimen stage consists of a light element, such as beryllium, that produces a very small amount of X-rays when irradiated with the electron beam. A metal film of a heavy element, such as gold, is deposited on the upper surface of the specimen stage. This metal film produces a large amount of X-rays when irradiated with the electron beam. The X-rays emitted from the lower magnetic pole piece are absorbed by the metal film. Consequently, the X-ray detector of the microscope detects only the X-rays produced from the specimen.

Electron microscope

A specimen-driving apparatus used with an electron microscope. The apparatus can translate or tilt the specimen holder while preventing it from being damaged if a human operator performs any erroneous operation. The device has X, Y, Z translation directive devices, and a tilt directive device for permitting the operator to enter instructions for translating and tilting the specimen holder. A contact detector senses that the holder is in contact with the upper magnetic pole piece. A tilt condition decision portion determines whether the holder has tilted into the positive or negative domain. A Z domain decision portion determines whether the Z coordinate of the holder lies in the positive or negative domain. When the contact of the holder with the pole piece is detected, reverse movement of the holder along the Z-axis is inhibited. Also, reverse tilting movement of the holder is inhibited. When the holder comes out of contact with the pole piece, these reverse movements are permitted.

Specimen-driving apparatus for electron microscope which tilts and

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Tokyo, Japan

Mikio Naruse