Komatsu Corporation

Kabushiki Kaisha Komatsu Seisakusho

Komatsu Industries Corporation

Mikio Minonishi

Yoshihiro Yamaguchi

Shigeo Morimoto

Iwao Kurokawa

Masamitsu Kitahashi

Katsuo Saio

Hiroshi Takada

Akihiro Ohsawa

Kenichi Bandoh

Kunio Horiai

Kazunori Tsunekawa

In order to increase the flow rate of coolant liquid supplied to the nozzle () of a plasma torch () and to extend the life of the plasma torch (), within the plasma torch (), an electrode coolant liquid passage (, and) which supplies coolant liquid to an electrode (), and a nozzle coolant liquid passage (and) which supplies coolant liquid to the nozzle (), are provided separately as independent coolant liquid passages which extend in parallel, and which are mutually electrically insulated from one another. Moreover, the flow rate of coolant liquid in the nozzle coolant liquid passage is greater than the flow rate of coolant liquid in the electrode coolant liquid passage.

Plasma cutting device, plasma torch, and cooling device for plasma torch

Electrode for a plasma torch

Object of the present invention is to provide uniform heat distribution to a substrate undergoing heat treatment on top of a heat exchange plate. A heat exchange plate is a flat, circular receptacle, has a cooling liquid inflow opening on one end and outflow opening on the other end, and cooling liquid flows on the inside. The surface of the plate is divided, for example, into four zones having different heat capacities and heat transfer characteristics, and an independently controllable foil heater A, A, A, A is attached to each zone. Heater A covers a zone, which circumferentially surrounds a substrate placed on top of a plate, heater A covers a zone directly beneath a substrate, heater A covers a zone of the vicinity of the outflow opening , and heater A covers a zone of the vicinity of the inflow opening . Temperature sensors are disposed on the inside of a plate at four locations of a second zone, which are apt to receive the affects of the first to fourth zones. Based on each plate temperature detected by the temperature sensors to , a temperature of the substrate at a location corresponding thereto is estimated.

Substrate temperature control plate and substrate temperature control apparatus comprising same

A disc heater is applied to a temperature control apparatus which controls a temperature of an object to be processed on at least one surface thereof. In the disc heater, wire-like heating elements are laid on a plate surface in a predetermined pattern and power feeding portions are disposed at ends of the wire-like heating elements. The pattern formed by the wire-like heating elements comprise a large number of arc portions disposed on a large number of concentric circles, and a surface area of the arc portions is 70% or greater, more preferably, 85 to 95% of a surface area of the entire pattern. With this feature, it is possible to effectively reduce the local excessively heated portion to the utmost, and to uniformly heat the entire heating surface, thus realizing an ideal topology pattern of the disc heater.

Disc heater and temperature control apparatus

Plasma arc welding method and apparatus in which a swirling flow is

Plasma arc welding apparatus and welding method using the same

Growing community of inventors

Hiratsuka, Japan

Mikio Minonishi