Ntt Electronics Corporation

Mikihiro Kurosawa

Masahiro Yanagisawa

Tomoyuki Yamada

Yoshinori Hibino

Manabu Oguma

An optical device manufacturing method and an optical device manufacturing apparatus using local etching are characterized in that in a wafer process of manufacturing a waveguide type optical device including a light-propagating core and a cladding, a nozzle which locally performs etching processing is used for movement, and a slanted end surface at an arbitrary angle, an end surface having a curved shape, or a core having a varying film thickness is formed in an arbitrary position on the wafer. A slanted end surface is formed at an optical waveguide end using local etching, for example, a 45° reflective mirror, a light-condensing nonplanar reflective mirror, or a film thickness controlled core is implemented, and high-efficiency optical connection is realized.

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Yokohama, Japan

Mikihiro Kurosawa