National Institute of Advanced Industrial Science and Technology

Taiyo Nippon Sanso Corporation

Miki Yoshimune

Kenji Haraya

Nobuo Hara

Yoshihiko Kobayashi

Yuzuru Miyazawa

An object of the present invention is to provide a method capable of easily controlling the permeation rate and the selectivity of gas molecules, in a hollow fiber carbon membrane which can be used as a gas separation membrane. The present invention provides a method of producing a hollow fiber carbon membrane, the method including: a preparation step of preparing a precursor made of an organic polymer compound in the form of a hollow fiber; a preheating step of heating the precursor to a temperature of 150&#xb0; C. to 400&#xb0; C. in an atmosphere containing an oxygen gas; and a carbonization step of heating the precursor which has been subjected to the preheating step to a temperature of 450&#xb0; C. to 850&#xb0; C., thereby carbonizing the precursor; wherein the carbonization step includes heating the precursor in the presence of a hydrocarbon gas which may contain a nitrogen atom and which has from 1 to 8 carbon atoms. This method allows for easily controlling the permeation rate and the selectivity of gas molecules, in the resulting hollow fiber carbon membrane.

Method for producing hollow fiber carbon membrane and separation membrane module

A gas purification method of the present invention uses a carbon membrane having a molecular sieving action to purify at least one selected from the group consisting of a hydride gas, a hydrogen halide gas, and a halogen gas, each gas containing an impurity at 10 ppm or less. The present invention can be used for a recovery unit that recoveries a used gas to reuse it as an ultrapure semiconductor material gas, and a unit or equipment that produces or charges an ultrapure semiconductor material gas.

Gas purification method

A hollow fiber carbon membrane is provided, which has excellent gas separation performance, unbreakable flexibility and high utility. The hollow fiber carbon membrane comprises carbonized substance obtained by calcination of a hollow fiber-like material formed from a polyphenylene oxide derivative, and has an external diameter in the range of 0.08 mm to 0.25 mm. The polyphenylene oxide derivative substantially comprises repeating units represented by the following (a) and (b) (in the structural formula, Rand Rindependently represent hydrogen atom or sulfone group, except that Rand Rare both hydrogen atoms), wherein the ratio A (%) of the repeating unit (b) to the repeating units (a)+(b) satisfies 15%&#x3c;A&#x3c;60%. 

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Tsukuba, Japan

Miki Yoshimune