Tokyo Electron Limited

Miki Ouchi

Yuka Nakasato

Masashi Takahashi

Tomohiro Saito

Yuichi Fukuchi

Masahiro Miya

A failure detection system detects a failure of a sensor that detects a state of a semiconductor manufacturing apparatus. The failure detection system includes a generation unit configured to generate times-series data of information on a detection value of the sensor during a determination period, a calculation unit configured to calculate a regression line of the times-series data, and a failure determination unit configured to determine whether the sensor has failed based on a slope of the regression line.

Failure detection system and failure detection method

A semiconductor manufacturing system according to an embodiment includes: a controller configured to control a semiconductor manufacturing apparatus; and a server configured to bidirectionally communicate with the controller via a communication line. The server includes a first processor configured to: transmit a backup file creation request (signal) that sets data specific to each controller as a backup file and transmit a backup file acquisition request (signal) requesting acquisition of the created backup file; and receive the created backup file. The controller includes a second processor configured to: receive a request (signal) from the server; and create the backup file when receiving the backup file creation request (signal).

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Iwate, Japan

Miki Ouchi