Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Technische Universitát Dresden

Mikhael El-Khoury

Andres Fabian Lasagni

Tim Kunze

Sabri Alamri

Bogdan Voisiat

Marko Seifert

Sven Bretschneider

Andrés Fabiàn Lasagni

An optical arrangement for direct laser interference structuring. A laser beam is directed to a reflecting mirror with inclined surface and strikes a first beam splitter, it is divided into two partial beams and one partial beam is deflected to a focusing element. The second partial laser beam is directed to a first pentamirror and after multiple reflection and/or refraction, the focusing element, or it is directed to a second beam splitter and is divided into a first partial beam and a third partial beam. The partial beams are directed to the focusing element by the first pentamirror and are directed by the focusing element to the surface to be structured interfering with each other. The reflecting mirror is moved in a translational manner, maintaining a 45&#xb0; angle parallel to the optical axes of the emitted laser beam influencing the interference period &#x39b;.

Optical arrangement for direct laser interference structuring

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Dresden, Germany

Mikhael El-Khoury