Sunedison Semiconductor Limited (uen201334164h)

Globalwafers Co., Ltd.

Mike Wolfram

Benno Orschel

A system for preventing an unsafe operation of a plurality of semiconductor wafer manufacturing machines communicatively coupled to a computing device. The system includes the computing device, which includes a processor coupled to a memory. The memory contains processor-executable instructions that, when executed, cause the computing device to perform the steps of storing, in the memory, a first state of a first machine of the plurality of machines, generating a first pending output to be issued to the first machine, determining whether an unsafe condition would result if the first pending output is issued to the first machine in the first state, issuing the first pending output upon determining that issuing the first pending output would not result in an unsafe condition, and blocking the first pending output from being issued upon determining that issuing the first pending output would result in an unsafe condition.

Methods and systems for preventing unsafe operations

A system for preventing an unsafe operation of at least one machine communicatively coupled to a computing device. The system includes the computing device which includes a processor coupled to a memory. The memory contains processor-executable instructions that, when executed, cause the computing device to perform the steps of storing, in the memory, a first state of a first machine of the at least one machine, generating a first pending output to be issued to the first machine, determining whether an unsafe condition would result if the first pending output is issued to the first machine in the first state, and issuing the first pending output upon determining that issuing the first pending output would not result in an unsafe condition and blocking the first pending output from being issued upon determining that issuing the first pending output would result in an unsafe condition.

A method and system for computerized coordination of multiple operations to be performed by components of machines are provided. The computer system includes a memory device for storing data and a computer-controlled machine that includes a processor in communication with the memory device wherein the processor is programmed to read a recipe file from the memory device, the recipe file including operating parameter values for controlling the operation of the machine, extract a name of a meta-recipe file from the recipe file, the meta-recipe file including a first portion including parameter properties of operating parameter values used by the meta-recipe file, receive values for the meta-recipe having the parameter properties specified in the first portion, and operate the machine using code from a second portion of the meta-recipe and the received values.

Method and system for a meta-recipe control software architecture

A method and data-logging system are provided. The system includes a map-ahead thread configured to acquire blocks of private memory for storing data to be logged, the blocks of private memory being twice as large as the file page size, a master thread configured to write data to the blocks of private memory, in real-time and in full resolution, the data acquired during operation of a machine generating the data and written to the blocks of private memory in real-time, the machine including a controller including a processor communicatively coupled to a memory having processor instructions therein, and a write-behind thread configured to acquire pages of memory that are mapped to pages in a file, copy the data from the blocks of private memory to the acquired file-mapped blocks of memory.

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Dachwig, Germany

Mike Wolfram