Kla-tencor Technologies Corporation

Mike Van Riet

Martin Plihal

Richard Wallingford

Joe Wang

Ajay Gupta

Santosh Bhattacharyya

Saibal Banerjee

David Y Wang

Patrick Huet

Chien-Huei (Adam) Chen

Tong Huang

Christophe Fouquet

Stewart Hill

Igor N Germanenko

Adam Chien-Huei Chen

Kaustubh (Kaust) Namjoshi

Michael Cook

Da Chen

Lian Yao

Methods for identifying array areas in dies formed on a wafer and methods for setting up such methods are provided. One method for identifying array areas in dies formed on a wafer includes comparing an array pattern in a template image acquired in one of the array areas to a search area image acquired for the wafer. The method also includes determining areas in the search area image in which a pattern is formed that substantially matches the array pattern in the template image based on results of the comparing step. In addition, the method includes identifying the array areas in the dies formed on the wafer based on results of the determining step.

Methods for identifying array areas in dies formed on a wafer and methods for setting up such methods

Methods, defect review tools, and systems for locating a defect in a defect review process are provided. One method includes acquiring one or more images and data from an inspection tool. The one or more images illustrate an area on a specimen in which a defect to be reviewed is located. The data indicates a position and features of the defect within the area. The method also includes acquiring one or more additional images of the specimen proximate the position of the defect indicated in the data using an imaging subsystem of a defect review tool. In addition, the method includes identifying a portion of the one or more additional images that corresponds to the one or more images. The method further includes determining a position of the defect within the portion of the one or more additional images using the data.

Methods, defect review tools, and systems for locating a defect in a defect review process

Methods and systems for generating an inspection process for an inspection system are provided. One computer implemented method includes generating inspection data for a selected defect on a specimen at different values of one or more image acquisition parameters of the inspection system. The method also includes determining which of the different values produces the best inspection data for the selected defect. In addition, the method includes selecting the different values determined to produce the best inspection data as values of the one or more image acquisition parameters to be used for the inspection process.

Methods and systems for generating an inspection process for an inspection system

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Morgan Hill, CA, United States of America

Mike Van Riet