Suss Microtec Test Systems Gmbh

Mike Lancaster

Claus Dietrich

Stefan Schneidewind

Frank-Michael Werner

Don Feuerstein

Denis Place

An apparatus for testing substrates reduces the area required and the costs which arise with the testing of substrates, in particular semiconductor wafers, during the production process. The apparatus includes testing arrangements comprising a chuck, a chuck drive, control electronics, probe or probe board holding means with a handling system, a substrate magazine station and an alignment station. The testing arrangements include at least two testing arrangements, both of which are all jointly operatively connected to the handling system, the substrate magazine station and the alignment station.

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Williston, VT, United States of America

Mike Lancaster