Dcg Systems Gmbh

Fei Comapny

Fei Efa, Inc.

Mike Berkmyre

Vladimir Ukraintsev

John M Sanders

Richard Stallcup

Sergiy Pryadkin

Apparatus for electrical and optical nanoprobing at resolution beyond optical diffraction limit. Navigation microscope is configured for navigation to a region of interest. A probe spatial positioner supports a fork and an oscillating piezotube is attached to the free end of the fork and provides an output indicating of a distance to the sample. A single-mode optical fiber having a near-field transducer formed at an end thereof is attached to the oscillating piezotube such that the near-field transducer extends below the oscillating piezotube towards the sample. A photodetector is positioned to detect photons collected from the sample. The near-field transducer may be formed as a tapered section formed at the end of the single-mode optical fiber, a metallic coating formed at a tip of the tapered section, and an aperture formed in the metallic coating so as to expose the tip of the tapered section through the metallic coating.

Optical nanoprobing of integrated circuits

A method for testing an integrated circuit (IC) using a nanoprobe, by using a scanning electron microscope (SEM) to register the nanoprobe to an identified feature on the IC; navigating the nanoprobe to a region of interest; scanning the nanoprobe over the surface of the IC while reading data from the nanoprobe; when the data from the nanoprobe indicates that the nanoprobe traverse a feature of interest, decelerating the scanning speed of the nanoprobe and performing testing of the IC. The scanning can be done at a prescribed nanoprobe tip force, and during the step of decelerating the scanning speed, the method further includes increasing the nanoprobe tip force.

Probe-based data collection system with adaptive mode of probing controlled by local sample properties

A system for performing sample probing. The system including an topography microscope configured to receive three-dimensional coordinates for a sample based on at least three fiducial marks; receive the sample mounted in a holder; and navigate to at least a location on the sample based on the at least three fiducial marks and the three-dimensional coordinates.

System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobing

A system for analyzing a sample is described. The system for analyzing a sample includes a probe and a controller circuit. The controller circuit configured to control a movement of the probe to at least a first position and a second position on the sample based on navigation data. In response to the movement of the probe, the controller circuit is configured to adjust a force of the probe on the sample at the first position from a first force value to a second force value and the force of the probe on the sample from a third force value to a fourth force value at said second position on the sample. And, the controller circuit is configured to acquire sample data with the probe at the first position on the sample.

Growing community of inventors

Allen, TX, United States of America

Mike Berkmyre