Advanced Energy Industries, Inc.

Mike Armstrong

Daryl Frost

John Accardo

Eric Seymour

Jack Gilmore

This disclosure describes systems, methods, and apparatus for reducing ripple in a pulsed waveform power generation system, often for use providing power to a plasma processing chamber. A snubber can be provided between a DC power supply and a switching circuit. A buck converter can also be provided between the snubber and the switching circuit, where the buck converter takes its input from within the snubber and in particular from between a rectifying and capacitive component of the snubber. In this way, the buck converter can be isolated from the DC power supply via an input inductor on a high-input line from the DC power supply.

Reduced ripple in switch mode power supply with snubber

Generators and methods for igniting a plasma in a plasma chamber are disclosed. The generator includes an ignition profile generator that includes a data interface configured to receive a specification for voltage as a function of time and an ignition data generator configured to create an ignition profile from the specification. The generator also includes an ignition profile datastore to store the ignition profile and a waveform generator configured to apply a waveform with the ignition profile to an output of the generator.

Programmable plasma ignition profiles

Generators and methods for igniting a plasma in a plasma chamber are disclosed. The generator includes an ignition profile generator that includes a data interface configured to receive a voltage value and a time value for each of N data points and an ignition data generator configured to create an ignition profile from the N data points. The generator also includes an ignition profile datastore to store the ignition profile and a waveform generator configured to apply a waveform with the ignition profile to an output of the generator.

Programmable ignition profiles for enhanced plasma ignition

A photovoltaic system, method and apparatus are disclosed. In an exemplary embodiment, the system includes a photovoltaic array, a distribution system that distributes power within a premises of a demand-side energy consumer, an inverter coupled to the distribution system that is configured to convert DC power from the photovoltaic array to AC power and apply the AC power to the distribution system, a damping portion configured to damp high frequency voltages derived from the inverter, and trapping circuitry coupled to the damping portion that is configured to reduce a level of low frequency current traveling through the damping portion.

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Loveland, CO, United States of America

Mike Armstrong