Asahi Glass Company, Limited

Optrex Corporation

Mika Yokoyama

Mitsuru Watanabe

Takashi Shibuya

Yoshiaki Ikuta

Hirotsugu Yamamoto

Toshiyuki Uno

Motoshi Ono

Naoki Kato

Toshihiko Higuchi

Kunio Masumo

Ken Ebihara

Junko Asakura

Satoshi Kondou

The present invention provides a method for smoothing an optical surface of an optical component for EUVL. Specifically, the present invention provides a method for smoothing an optical surface of an optical component for EUVL made of a silica glass material containing TiOand comprising SiOas a main component with a laser having an oscillation wavelength, to which the optical component for EUVL has an absorption coefficient of 0.01 &#x3bc;mor more, at a fluence of 0.3 to 1.5 J/cmin an atmosphere having a water vapor partial pressure of 3.6 mmHg or less.

Optical component for EUVL and smoothing method thereof

To provide a method for smoothing a surface of a glass substrate having a concave defect, such as a pit or a scratch. A method for smoothing a surface of a glass substrate having a concave defect thereon, comprising: forming a film on the surface of the glass substrate having the concave defect by a dry deposition method, the film comprising a glass material having a fluid point Tf of 150&#xb0; C. or above and of not higher than a strain point Ts (&#xb0; C.) of the glass substrate; and heating the film of the glass material at a temperature of not lower than Tf and not higher than Ts to put the film in such state that the film of the glass material can flow so as to bury the concave defect, followed by cooling the film of the glass material, thereby to smooth the surface of the glass substrate having the concave defect.

Method for smoothing a surface of a glass substrate for a reflective mask blank used in EUV lithography

An organic EL display device includes color filters, an overcoat layerand an inorganic solid layerdisposed on a substrate; a first electrodes, an organic filmand a second electrodesdisposed on the inorganic solid layer; an insulating layerdisposed so as to cover edge portions of the first electrodes. The organic EL display device can improve production yield and restrain visual failure from being caused with the lapse of time by including a protection layerso as to prevent the inorganic solid layerfrom being damaged.

Organic EL display device and method for fabricating the same

A transparent coated molded product comprising a transparent synthetic resin substrate and two or more transparent cured material layers provided on at least one part of the surface of the transparent synthetic resin substrate, wherein an inner layer in contact with the outermost layer of the two or more transparent cured material layers is an abrasion-resistant layer which is a cured material of an active energy ray-curable coating agent (A) containing a polyfunctional compounds (a) having at least 2 active energy ray-curable polymerizable functional groups and the outermost layer is a silica layer which is a cured material of a curable coating agent (B) of polysilazane or a curable coating agent (B) containing polysilazane.

Transparent coated molded product and method for producing the same

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Yokohama, Japan

Mika Yokoyama