Samsung Electronics Co., Ltd.

Mijeong Kim

Keechang Lee

Jin Wook Lee

Pankwi Park

Younjoung Cho

Changho Noh

Keum Seok Park

Jeongho Yoo

Wonwoong Chung

Songwon Hyun

Byung Koo Kong

Changeun Jang

Sangsoo Jee

Yoonseok Ko

Yeonock Han

Insu Lee

An epoxy compound having an aromatic ring represented by Formula 1 or Formula 2, a composition prepared from the epoxy compound, a semiconductor device prepared from the epoxy compound, an electronic device prepared from the epoxy compound, an article prepared from the epoxy compound, and a method of preparing the epoxy compound:E1-(M1)-(L1)-(M2)-L2-A1-L3-(M3)-(L4)-(M4)-E2&#x2003;&#x2003;Formula 1E3-(A2)-(L5)-(M5)-L6-(M6)-L7-(M7)-(L8)-(A3)-E4&#x2003;&#x2003;Formula 2 In Formulae 1 and 2, M1, M2, M3, M4, M5, M6, M7, A1, A2, A3, L1, L2, L3, L4, L5, L6, L7, L8, E1, E2, E3, E4, a1, a2, a3, a4, a5, a6, a7, b1, b2, b3, b4, c1, and c2 are the same as defined in the detailed description.

Epoxy compound, composition prepared therefrom, semiconductor device prepared therefrom, electronic device prepared therefrom, article prepared therefrom, and method of preparing epoxy compound

A method of manufacturing a semiconductor device includes disposing a gas-storage cylinder storing monochlorosilane within a gas supply unit. The monochlorosilane is supplied from the gas-storage cylinder into a process chamber to form a silicon containing layer therein. The gas-storage cylinder includes manganese.

Gas storage cylinder, deposition system, and method of manufacturing semiconductor device

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Yeongju-si, South Korea

Mijeong Kim