Samsung Display Co., Ltd.

Hims Co., Ltd.

Mihye Kwon

Sangdon Hwang

Jimin Woo

BongSuk Kim

TaeHyun Kim

Ilha Song

A mask inspection method includes photographing a cell mask through which openings is formed to obtain an image, setting an area of the image adjacent to an edge of the cell mask as an inspection area, comparing a grayscale of the openings in the inspection area with a reference grayscale, and checking a defect of the cell mask according to a result of the comparing of the grayscale of the openings.

Mask inspection apparatus and mask inspection method using the same

A mask inspection method including the steps of obtaining an image of a mask including a first region having a plurality of first openings, and a second region having a plurality of second openings, sectioning the image into a first partial image corresponding to the first region and a second partial image corresponding to the second region, respectively, inspecting the first region of the mask based on the first partial image, and inspecting the second region of the mask based on the second partial image.

Growing community of inventors

Asan-si, South Korea

Mihye Kwon