Hitachi, Ltd.

Michiyasu Itoh

Hideo Fujiwara

Isao Ishikawa

Yasutaro Uesaka

Kazuo Ichino

Yukio Ichinose

Sadayasu Ueno

Fumiyuki Inose

Katsuhisa Usami

Isamu Orita

Satoshi Taniguchi

Tsutomu Kobayashi

Hisashi Thuruoka

Yoshitaka Goto

A charged-particle energy analyzer having means for irradiating a sample with a primary electron beam, deflecting electrode means which focus charged particle flux emitted from the sample onto a center axis of the primary electron beam or onto an identical circumference with its center on the axis, a slit disposed at the focus point of the charged particles, an energy analyzer whose object point lies at the focus point, a detector for detecting the charged particles analyzed by the energy analyzer, and charged particle flux deflecting means provided between the sample and the detector, for shielding by one part of the charged particle flux focused in a true circular form, to thereby make it possible not only to set a wide accepted solid angle for signals but also to get an information as to the concave or convex surface condition of the sample at the measured portion.

Charge-particle energy analyzer

A charged-particle beam correction arrangement for a charged-particle analyzer having deflecting electrodes which focus charged particles emitted from a sample onto a center axis, an extension thereof, or onto an identical circumference with its center on the axis, a slit which is disposed at the focus point, and an energy analyzer whose object point lies at the focus point. The charged-particle beam correction arrangement is disposed axially symmetrically in the vicinity of the path of the charged particles between the sample and the slit to correct a deformation in the focusing of the charged-particle beam. BACKGROUND OF THE INVENTION

Charged-particle analyzer

A variable inductor wherein two closed magnetic circuits each having a predetermined gap in one place are constructed of a movable magnetic core and a fixed magnetic core. When the movable magnetic core is moved, the opposite area between both the magnetic cores in one of the closed magnetic circuits increases, while the opposite area between both the magnetic cores in the other closed magnetic circuit decreases. Thus, the inductances of coils wound around parts of the respective closed magnetic circuits vary complementarily.

Variable inductor

A digital displacement sensor includes a plurality of zigzag coils provided with projecting or convex portions having different pitches and arranged on the surface of a flat plate. A magnetic head consisting of a magnetic body and a coil is wound around part of the magnetic body, the magnetic head being supported so as to be moved, while maintaining a given gap from the surface of the flat plate, whereby a digital signal corresponding to the displacement of the magnetic head is sensed by means of a plurality of zigzag coils.

Digital displacement sensor with zigzag coils

Growing community of inventors

Kodaira, Japan

Michiyasu Itoh