Olympus Corporation

Olympus Optical Company, Ltd.

Nagoya Institute of Technology

Michitsugu Arima

Hiroshi Miyajima

Masashi Kitazawa

Kazuya Matsumoto

Junichi Nakano

Daisuke Matsuo

Kenzi Murakami

Kazunari Tokuda

Jun Funazaki

Masaki Tanemura

Masahiro Katashiro

Fumitaka Ozeki

Yukiaki Minamoto

Shigeru Komiyama

Ryouji Hyuuga

The present invention provides a cantilever for a scanning type probe microscope, the cantilever including a support portion, a lever portion extending from the support portion, a protrusion portion formed on a free end side of the lever portion, an apex angle of the protrusion portion being an acute angle, and a probe in which a fine wire formed at a distal end of the protrusion portion is coated with a functional film, and a major axis/minor axis ratio of a cross-sectional shape of the probe is smaller than a major axis/minor axis ratio of a cross-sectional shape of the fine wire.

Cantilever for a scanning type probe microscope

There is disclosed a mirror rocking member for an optical deflector. The optical deflector comprises the mirror rocking member for deflecting light, and a driver for driving the member. The mirror rocking member comprises a movable plate having a reflective surface, an elastic member for rockably supporting the movable plate, and a support for supporting the elastic member. The movable plate has an electric element, which constitutes a part of the driver. The movable plate includes a first portion having the reflective surface, and a second portion including an electric element. The first portion has a reflective-surface forming surface with the reflective surface formed thereon, the second portion has an electric-element forming surface with the electric element formed thereon, and the reflective-surface forming surface has an area smaller than an area of the electric-element forming surface.

Mirror rocking member for optical deflector

There is disclosed a movable structure, which includes a movable body, at least a pair of elastic members extending from the movable body to both sides, and a support supporting the movable body through the elastic members, each elastic member having a mesh structure, and the support and the movable body being connected to each other through the elastic members.

Shape variable mirror

A light intercepting device includes a movable portion allowed to swing about a support portion as a torsional axis, a shielding portion provided at an end portion of the movable portion in a direction perpendicular to the torsional axis, a driving wiring provided on the movable portion, and a magnetic field generator to apply a magnetic field to at least a part of the driving wiring in a direction perpendicular to the driving wiring. A position of the shielding portion is changed by power supply control for the driving wiring to control transmission and interception of space light.

Light intercepting device and optical switch apparatus

Movable structure, and deflection mirror element, optical switch element and shape variable mirror including the movable structure

The present invention is directed to an optical deflector. The optical deflector includes a support body, a movable plate, a pair of first elastic portions connecting the movable plate and the support body, a pair of second elastic portions connecting the movable plate and the support body, a first drive wiring extending through the support body, the first elastic portions and the movable plate, a second drive wiring extending through the support body, the second elastic portions and the movable plate, and a magnetic field generator. The movable plate has a reflecting surface to reflect a light beam. The first and second elastic portions are elastically deformable to allow the movable plate to rotate about first and second rotational axes, respectively. The first and second drive wirings include parts that are positioned in the movable plate and respectively extend in parallel with the first and second rotational axes.

Optical deflector and electromagnetic actuator

There is disclosed an optical deflector comprising an oscillating member including a movable plate allowed to oscillate, the movable plate including a coil extending along its periphery, and a magnetic field generation portion, such that the movable plate oscillates in accordance with a force generated by an interaction of a current flowing through the coil with the magnetic field generated by the magnetic field generation portion, wherein the movable plate has first and second surfaces extending in substantially parallel with each other, an imaginary plane including the first surface of the movable plate in a neutral position defines two spaces, one including the second surface of the movable plate and the other not including the second surface, and the magnetic field generation portion is positioned in the space including the second surface of the movable plate.

Optical deflector

The present invention provides a method of manufacturing a three-dimensional structure having portions different in thickness, the method comprising forming a laminated structure, which comprises at least two layers to be processed and at least one inner mask interposed between the layers, the layers and the inner mask being joined together, such that the laminated structure has top and bottom major surfaces, forming an outer mask on at least one of the major surfaces of the laminated structure, selectively etching the layers from one of the major surfaces of the laminated structure through the outer mask to expose the inner mask and then through the inner mask, so that the portions different in thickness are formed by one etching process.

Method of manufacturing three-dimensional structure and method of manufacturing oscillator

An electric charge generator for use in an apparatus for producing an electrostatic latent image includes a plurality of charge generation controlling devices, each charge generation controlling device including: an insulating substrate; a line electrode formed on the insulating substrate; a solid dielectric film formed on the surface of the line electrode; a finger electrode having a hole for generating an electric charge, the hole being formed in the central part of the finger electrode, the finger electrode being formed on the solid dielectric film; a solid insulating film having a hole for passing the electric charge, the hole being formed in the central part of the solid insulating film, the solid insulating film being formed on the finger electrode; and a screen electrode having a hole for ejecting the electric charge, the hole being formed in the central part of the screen electrode, the screen electrode being formed on the surface of the finger electrode via the solid insulating film; wherein the plurality of charge generation controlling devices are arranged on the insulating substrate so as to form the electric charge generator. The solid insulating film is formed of a multilayer solid insulating film including a surface-side layer made of an inorganic insulating film and a substrate-side layer made of an organic insulating film whereby the durability and the reliability are improved.

Growing community of inventors

Kamiina-gun, Japan

Michitsugu Arima