Seiko Epson Corporation

Michio Yanagisawa

Masahisa Ikejiri

Tatsuya Shimoda

Hiroshi Ito

Hajime Miyazaki

Koji Akioka

Tsugio Ide

Tsukasa Muranaka

Kunihiro Inoue

Shouichi Uchiyama

Mitsuhiro Horikawa

An actuator rotatable about a support shaft rectilinearly movable along axis of a shaft and rotatably movable about the shaft includes a cylindrical magnet extending about the shaft. The cylindrical magnet has a plurality of poles in the radial direction and magnetized boundaries between poles of opposite polarity extending in a circumferential direction of the magnet and extending in an axial direction of the magnet. A plurality of yokes are provided to define magnetic poles coupled in facing relationship with the magnetic boundaries of a cylindrical magnet and having coils coupled thereto to define the magnetic poles.

Actuator and method of manufacturing thereof

A humidity sensing apparatus which includes a humidity sensor which detects humidity as a function of impedance is provided. A reference resistor has a predetermined resistance value. A charge switching circuit selectively couples one of the reference resistor or the humidity sensor in series with a reference capacitor which has a predetermined capacitance. A voltage judging circuit determines whether the terminal voltage of the reference capacitor is high or low. A charge/discharge switch selectively charges and discharges the reference capacitor in accordance with the output of the voltage judging circuit. A sensor direction switching circuit inverts the direction of current flowing through the humidity sensor during charging of the reference capacitor. An oscillation frequency counter counts the number of charge/discharge cycles which are repeated during a predetermined time period. A humidity sensor resistance value calculating circuit calculates the resistance value of the humidity sensor in accordance with the number of repeated charge/discharge cycles when the reference capacitor is coupled to the reference resistor for charging and the number of repeated charge/discharge cycles when the reference capacitor is coupled to the humidity sensor during charging. A humidity determining circuit determines the humidity from the resistance value of the humidity sensor calculated by the humidity sensor resistance value calculating circuit.

Humidity measuring apparatus

A humidity sensor including an insulating substrate, a pair of electrodes formed on the insulating substrate, and a porous silica film with carbon particles dispersed therein is formed over the insulating substrate and electrodes. A silica film may be formed over the porous silica film or directly on the porous silica film containing carbon particles, or directly on the insulating substrate with the electrodes formed thereon to increase adhesion between the porous silica film and the substrate.

Humidity sensor

Growing community of inventors

Suwa, Japan

Michio Yanagisawa