Fujikin Inc.

Other

Tokyo Electron Limited

Tokushima University

Tohoku University

Ckd Corporation

Tadahiro Ohmi

Japan Health Sciences Foundation

Aera Japan Ltd.

Ohmi,tadahiro, Miyagi

Fujkin Incorporated

Michio Yamaji

Nobukazu Ikeda

Tsutomu Shinohara

Kouji Nishino

Tadayuki Yakushijin

Tomohiro Nakata

Ryousuke Dohi

Tsuyoshi Tanikawa

Keisuke Ishibashi

Takashi Hirose

Keiji Hirao

Tetsuya Kojima

Akihiro Morimoto

Shigeru Itoi

Eiji Ideta

Hiroshi Morokoshi

Yukio Minami

Kenji Tsubota

Tomio Uno

Masaaki Nagase

Kosuke Yokoyama

Kazuhiro Yoshikawa

Tsuneyuki Okabe

Kazuhiko Sugiyama

Satoshi Kagatsume

Shigeaki Tanaka

Hiroyuki Fukuda

Ichiro Tokuda

Yuji Kawano

Kenji Yamamoto

Akihiro Harada

Yasumasa Yanagida

Shuji Moriya

Yoshihiro Deguchi

Naofumi Yasumoto

Jun Hirose

Toshihide Yoshida

Ryosuke Dohi

Kazuteru Tanaka

Tetu Kagazume

Susumu Ozawa

Atsushi Matsumoto

Norihiko Amikura

Wataru Okase

Takahiro Matsuda

Hiroshi Koizumi

Ryutaro Nishimura

Masafumi Kitano

Mutsunori Koyomogi

Takashi Funakoshi

Yukio Naito

Hideki Nagaoka

Toyomi Uenoyama

Naoya Masuda

Masayuki Hatano

Taichi Kitano

Masahiko Satoh

Satoshi Muto

Migaku Takahashi

Kohei Shigyou

Izuru Shikata

Koji Kawada

Hidenori Kiso

Kenichi Goshima

Koji Nishino

Hisashi Tanaka

George Hoshi

Kunio Nagai

Michio Kuramochi

Masayoshi Kawashima

Shigetoshi Sugawa

Katsuyuki Sugita

Yasuyuki Shirai

Ken Ishii

Rihito Kuroda

Ryutaro Tanno

Toshiyuki Inada

Kenji Sunagawa

Masahiko Nakazawa

Masaru Sugimachi

Kunihiko Daido

Katunori Komehana

Takeru Miura

Kouji Kawada

Koji Hiramatsu

Teruo Honiden

Keiko Hada

Touru Hirai

Tomokazu Imai

Kuniyasu Sakashita

Yoshinori Shimomura

Taiji Chiba

Keigo Kobayashi

Kazunori Uemura

Tatsuhiko Sato

To provide a valve that is easily assembled and has a low possibility of breakage of a coupled section even when the valve has to be downsized or subjected to a large load. A valve has a valve unit and a drive unit, is configured to include: a first recess that is a recess formed in either one of a second stem or a first stem and is formed with a groove at a predetermined position on an inner circumferential surface of the recess; a second recess formed in another one thereof; a stem pin accommodated in both of the recesses; an urging member that is accommodated in the first recess and urges the stem pin to the other side; a sidewall through-hole that penetrates a sidewall of the second recess horizontally; and a ball that enters the sidewall through-hole.

Valve

A valve device comprising: a flow passage block in which a flow passage is formed; a diaphragm configured to open and close the flow passage; an actuator configured to push down the diaphragm via a diaphragm holder; a tubular bonnet formed with an internal thread on an inner circumferential surface, the bonnet being configured to join the flow passage block and the actuator; a tubular adjusting screw threaded to the internal thread, the adjusting screw being configured to come into contact with the diaphragm holder to adjust a valve opening position of the diaphragm; and an annular lock nut configured to lock the adjusting screw by being screwed into the internal thread.

Valve device, fluid control device, and manufacturing method of valve device

A concentration measuring devicecomprises: a measurement cellhaving a flow path, a light source, a photodetectorfor detecting light emitted from the measurement cell, and an arithmetic circuitfor calculating light absorbance and concentration of a fluid to be measured on the basis of an output of the photodetector, the measurement cell includes a cell body, a window portionfixed to the cell body so as to contact the flow path, and a reflective memberfor reflecting light incident on the measurement cell through the window portion, the window portion is fixed to the cell bodyby a window holding membervia a gasket, an annular sealing protrusionis provided on a first surface of the gasket for supporting the window portion, and an annular sealing protrusionis also provided on a support surfaceof the cell body for supporting the second surface opposite to the first surface of the gasket.

Concentration measurement device

A fluid heater includes: a passage member having a passage formed therein; a heater for heating the passage member; a fixing member for fixing the passage member to a fluid control device; and a connection member connected to the passage member so as to allow fluid to flow into the passage member. The passage has a helical shape.

Fluid heater, fluid control apparatus, and production method for fluid heater

A gasket includes a thick portion providing a first face seal and a thin portion providing a second face seal. A fluid coupling has an annular gasket housing recess that includes a wide portion for housing the thick portion of the gasket and a narrow portion for housing the thin portion of the gasket.

Gasket for fluid coupling, and fluid coupling

A fluid controller is provided having a flow path through which a fluid can flow, a closed space separated from the flow path by an isolation member, and a leak port capable of communicating the closed space with an external part. An anomaly detection device for detecting an anomaly has a pressure sensor detachably fixed to the leak port, a pressure sensor for detecting the pressure in the closed space, a processing module for executing a predetermined information processing, and an detachable mechanism for blocking the leak port from the external part in the state of being fixed. The processing module determines an anomaly of the fluid controller by comparing a detection value detected by the pressure sensor to a predetermined threshold, and transmits a discrimination result of the anomaly of the fluid controller to a server.

Anomaly detection device for fluid controller, anomaly detection system, anamoly detection method, and fluid controller

Provided are a seal structure in which sealing performance is ensured over a long period of time even when it is used for low-temperature fluids, a sealing method, and a coupling including the seal structure. The seal structure includes an annular gasket interposed between a first member and a second member. The first member is provided on its surface facing the gasket with: a first surface located on the inner diameter side; a first annular protrusion located on the outer diameter side of the first surface; a second surface located on the outer diameter side of the first protrusion; a second annular protrusion located on the outer diameter side of the second surface and having a greater protruding amount with respect to the second surface than that of the first protrusion; and a third surface located on the outer diameter side of the second protrusion.

Seal structure, sealing method, and coupling equipped with said seal structure

Provided is a small-sized controller capable of precisely controlling a flow rate of a high-pressure fluid. Between a working shaft of a drive device and a valve stem, a power transmission device is disposed to amplify a force acting on the working shaft and transmit the resultant force to the valve stem. A diaphragm as a valve element is made of metal and is deformable to: a state where a fluid passage is fully closed; a state where the fluid passage is fully open; or a state where the fluid passage is partially open. When the fluid passage is partially open, on the basis of the flow rate of a fluid flowing through fluid passages, the drive device finely adjusts the position of the working shaft such that the flow rate is constant.

Controller

A concentration measurement device for measuring the concentration of a measured fluid within a measurement cell by detecting transmitted light that has passed through the measurement cell having a light incidence window and a light emission window disposed opposing to each other, comprising a reflected-light detector for detecting reflected light of the light incidence window.

A first on-off valve () and a second on-off valve () each are a two-port valve. A first passage block () is provided with a first on-off valve-corresponding inflow passage () and a first on-off valve-corresponding outflow passage (). A second passage block () is provided with a second on-off valve-corresponding inflow passage () and a second on-off valve-corresponding outflow passage (). The second on-off valve-corresponding outflow passage () is in communication with an upstream side portion of the first on-off valve-corresponding outflow passage () via a communicating passage () formed in the first passage block (). An orifice () is provided between the second on-off valve-corresponding outflow passage () and the communicating passage ().

Shutoff-opening device

Provided is a switching valve for use in an analyzer module for switching flow passages of fluids, in which the manufacturing cost is reduced and the life is increased. The valve element is provided with a lower contact portion that comes into close contact with a lower valve seat disposed at a valve body when a valve is closed, and with an upper contact portion that comes into close contact with an upper valve seat disposed at a counter plate when the valve is open. The counter plate has a first recess that is open downward and a second recess that is open toward the first recess and has a smaller horizontal cross-sectional area than that of the first recess, and the upper valve seat is press-fitted into the second recess.

Switching valve

A valve element significantly improved in rotation preventing performance of an abutting member formed of a synthetic resin by using a caulking structure and a high-temperature-oriented valve provided with such a valve element. A valve element includes: an abutting member formed of a synthetic resin and configured to close a path opening by coming into abutment with a path opening edge, and a holding member having a recessed portion into which the abutting member is fitted, in which the holding member is caulked and thus the abutting member is held by the holding member. The holding member is provided with a plurality of notches at a portion to be caulked.

Valve element and high-temperature-oriented valve

A valve element movement mechanism includes: a first valve stem having one end portion to which a first valve element to close and open an area between one of the large diameter portion and the small diameter portion is fixed; a second valve stem having one end portion to which a second valve element to close and open an area between the other of the large diameter portions and the small diameter portion is fixed; a first bellows having one end portion fixed to a first bellows flange and the other end portion fixed to the first valve element; a second bellows having one end portion fixed to a second bellows flange and the other end portion fixed to the second valve element; a frame disposed outside the main passage; and an actuator to move the frame in the directions in which valve elements are closed and opened.

Flow dividing valve

To provide a concentration measurement method with which the concentrations of predetermined chemical components can be measured non-destructively, accurately, and rapidly by a simple means, up to the concentrations in trace amount ranges, as well as a concentration measurement method with which the concentrations of chemical components in a measurement target can be accurately and rapidly measured in real time up to the concentrations in nano-order trace amount ranges, and which is endowed with a versatility that can be realized in a variety of embodiments and modes. In the present invention, a measurement target is irradiated, in a time sharing manner, with light of a first wavelength and light of a second wavelength that have different optical absorption rates with respect to the measurement target. The light of each wavelength, arriving optically via the measurement target as a result of irradiation with the light of each wavelength, is received at a shared light-receiving sensor. A differential signal is formed, the differential signal being of a signal pertaining to the light of the first wavelength and a signal pertaining to the light of the second wavelength, the signals outputted from the light-receiving sensor upon receipt of the light. The concentration of a chemical component in the measurement target is derived on the basis of the differential signal.

Optical gas concentration measuring method by forming a differential signal using lights with different absorbabilities to a raw material in a gas flow path using a time-sharing method

Growing community of inventors

Osaka, Japan

Michio Yamaji