Leland Stanford Junior University

Michio Naito

Theodore H Geballe

Kookrin Char

Aharon Kapitulnik

Robert H Hammond

Byungdu Oh

Malcolm R Beasley

Andy Kent

A method of forming a superconducting YBa.sub.2 Cu.sub.3 O.sub.7-x thin film with selected crystal orientation is described which comprises the steps of sputtering simultaneously Y, Ba and Cu onto the surface of a substrate, introducing oxygen at said surface during deposition, controlling the stoichiometry of the elements Y, Ba or both richer or poorer than the 1:2:3 stoichiometry within a few atom percent and followed by annealing to selectively grow an a-axis or a c-axis oriented film of YBa.sub.2 Cu.sub.3 O.sub.7-x.

Method of forming superconducting YBa.sub.2 Cu.sub.3 O.sub.7-x thin

Growing community of inventors

Tokyo, Japan

Michio Naito