Sony Corporation

Michio Mano

Makoto Takatoku

Masafumi Kunii

Masumitsu Ino

Masahiro Fujino

Akihiko Asano

Yukiyasu Sugano

Takenobu Urazono

Process of crystallizing semiconductor thin film and laser irradiation system

A polycrystalline thin film of good quality is obtained by improving a crystallization process of a semiconductor thin film using laser light. After conducting a film forming step of forming a non-single crystal semiconductor thin film on a surface of a substrate, an annealing step is conducted by irradiating with laser light to convert the non-single crystal semiconductor thin film to a polycrystalline material. The annealing step is conducted by changing and adjusting the cross sectional shape of the laser light to a prescribed region. The semiconductor thin film is irradiated once or more with a pulse of laser light having an emission time width from upstand to downfall of 50 ns or more and having a constant cross sectional area, so as to convert the semiconductor thin film contained in an irradiated region corresponding to the cross sectional area to a polycrystalline material at a time. At this time, the energy intensity of laser light from upstand to downfall is controlled to apply a desired change. According to the procedures, a polycrystalline material having a large particle diameter or a uniform particle diameter can be obtained. In some cases, upon irradiation with laser light, the substrate may be maintained in a non-oxidative atmosphere, or may be heated or cooled.

Process for producing thin film semiconductor device and laser irradiation apparatus

Process of crystallizing semiconductor thin film and laser irradiation

A process of production of a semiconductor device comprising the steps of forming a first interlayer insulating film for covering a transistor formed on a substrate; forming a contact hole which will be connected to the transistor and a contact hole for local connection which will connect locations near each other simultaneously; and filling the contact holes with a conductor to form conductive plugs.

Method of making a semiconductor device having local connections formed

Semiconductor device having local connections formed by conductive plugs

Growing community of inventors

Kanagawa, Japan

Michio Mano