Canon Kabushiki Kaisha

Michio Horikoshi

Kazuo Watanabe

Mahito Negishi

Shigeo Sakino

Tadayuki Kubo

Kazuya Ono

Mitsuru Inoue

Eiji Osanai

Koichi Matsushita

Makoto Higomura

Hiroyuki Otsuka

Kazuya Sawaguchi

A fabrication method for an electron source substrate comprises: a measurement step wherein at least one of a substrate, having a plurality of pairs of electrodes on the surface thereof, and measurement means for measuring the position of the substrate in at least one direction of the mutually orthogonal XYZ directions, is scanned relatively in one direction, thereby measuring the substrate position; a control step for controlling the discharge position of droplets containing electroconductive thin-film material onto the substrate from an ink-jet head, based on the measurement results; and a discharge step for discharging the droplets between the pairs of electrodes while relatively scanning at least one of the ink-jet head and substrate in one direction; wherein the scanning direction in the measurement step and the scanning direction in the discharge step are generally parallel; and wherein the measurement step and the discharge step are performed in a single scan.

Fabrication method for electron source substrate

A fluid bearing includes a rotary body with a rotor having a cylindrical surface to be borne and a thrust plate arranged at least at an end of the rotor, and a housing including a radial bearing section arranged vis-a-vis the surface of the rotor and a thrust bearing section arranged vis-a-vis the thrust plate. The thrust plate has a hole bored around the axis of rotation of the rotary body and the inner diameter of the hole is greater at the rotor side than at the opposite side.

Fluid bearing and rotary drive apparatus using the same

A linear driving device includes a hydrostatic gas bearing, a shaft supported by the bearing, and a voice-coil motor for driving the shaft in a direction of movement. The bearing and the shaft are disposed within the voice-coil motor. The device further includes a locking mechanism for constraining the movement of the shaft in its direction of movement. In addition, the voice-coil motor includes a coil assembly having a coil. The coil assembly forms a closed space surrounded by the coil. The coil assembly has a plurality of exhaust holes therein communicating with the outside from the closed space.

Linear driving device

A linear-motion driving device includes a movable shaft, a gas bearing for supporting the movable shaft, a housing for supporting the gas bearing, and a motor having a voice coil for displacing the movable shaft. The bearing housing is disposed inside the voice coil.

Rectilinear-motion driving device for voice coil motor

In a movement guiding device, two parallel stationary guides are fixed to a surface plate and plural hydrostatic gas or bearing members are provided for the surface plate and the stationary guides. A Y stage is moved in a Y-axis direction under the influence of these bearing members. Additional hydrostatic gas or air bearing members are provided in relation to the surface plate and the Y stage so as to support an X stage for movement in an X-axis direction orthogonal to the Y-axis direction. Guide of the Y stage in the X-axis direction is made by the stationary guides on the surface plate, while guide thereof in a Z-axis direction perpendicular to an X-Y plane is made by the surface plate. Guide of the X stage in the Y-axis direction is made by the Y stage, while the guide thereof in the Z-axis direction is made by the surface plate, similar to the Y stage. With such structure, any vibration, rolling, or otherwise, of the Y stage is not transmitted to the X stage. Thus, high-precision guide is attainable. Linear motors are used as drive sources for the X and Y stages, so that all movable portions are provided by non-contact structures. Further, suitable brake members are used, which members are operable at a time of an accident of the stage. By this, accidental collision of the stage and/or derailment of the stage from the guide can be prevented.

Movement guiding mechanism

A moving mechanism for relatively moving first and second members, the mechanism comprising a first fluid discharging portion provided on the first member, for relatively supporting the second member by use of a static pressure, and a second fluid discharging portion operable to produce a static pressure that is effective to apply, to the first member, a force contributable to prevent any deformation of the first member due to the static pressure caused by the first fluid discharging portion.

Growing community of inventors

Ibaraki, Japan

Michio Horikoshi