Canon Kabushiki Kaisha

Hitachi High-tech Corporation

Michiko Suzuki

Kazuki Ishizawa

Kenichi Nishinaka

A charged particle microscope includes an electron gun provided inside a barrel and a stage. In the stage, a sample holderholding a sample SAM can be installed. The stageincludes an annular rough movement stage memberand an annular fine movement stage member. An X rough movement actuatorand a Y rough movement actuatorare connected to the rough movement stage member. An X fine movement actuatorand a Y fine movement actuatorare connected to the fine movement stage member. Here, a first movable range in which the X rough movement actuatorand the Y rough movement actuatorare able to move the rough movement stage memberis broader than a second movable range in which the X fine movement actuatorand the Y fine movement actuatorare able to move the fine movement stage member. Accordingly, it is possible to improve performance of the charged particle microscope.

Charged particle microscope and stage

An optical system for a color television camera device, wherein a first color-selecting filter is located in a substantially afocal light beam between the front group and the rear group of the relay portion; a first color component light separated by a first color-separating filter forms a first color component image on a first pickup tube with the aid of the first rear group of the relay portion; the light containing the remainder of the color components separated by the first color separating filter is directed to the second rear group of the relay portion; the light from the second rear group containing the abovementioned remainder of the color components is directed to a second color-separating filter; the lights containing second and third color components separated by the second color-separating filter are respectively directed to second and third pickup tubes; and these second and third lights form second and third color component images on second and third pickup tubes with aid of the second rear group of the relay portion.

Growing community of inventors

Tokyo, Japan

Michiko Suzuki