Ibigawa Electric Industry Co., Ltd.

Michihiro Yoshioka

Ryo Enomoto

Takao Yokoyama

.beta.-type silicon carbide having exceedingly high purity is stably and continuously produced in an apparatus comprising a vertical type reaction vessel having an inlet, a preheating zone, a heating zone, a cooling zone and a closable outlet which are sequentially communicated in this order in vertical direction, and a heat insulating layer composed essentially of fine powders of graphite and carbonaceous materials arranged on at least outside of the heating zone, the heating zone of the reaction vessel being made of graphite and having a heating means to indirectly and electrically heat charged materials, the preheating zone having a horizontal cross-sectional area larger than that of the heating zone at any level above an arbitrary position of the preheating zone.

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Gifu, Japan

Michihiro Yoshioka