Matsushita Electric Industrial Co., Ltd.

Panasonic Corporation

Panasonic Intellectual Property Management Co., Ltd.

Michihiko Hayashi

Hirofumi Tajika

Masaya Nakatani

Masahiro Yasumi

Shoji Okamoto

Satoshi Ohuchi

Tsutomu Nakanishi

Satoshi Ouchi

Yuuki Nakamura

Masakazu Hatanaka

An electronic component is disclosed, and this component includes an element with an electrode section which is formed of upper electrode (), lower electrode (), piezoelectric unit () placed between upper electrode () and lower electrode (), and adhesive layer () layered between upper electrode () and piezoelectric unit (). Piezoelectric unit () includes piezoelectric layer () made of piezoelectric material containing lead, and adhesive layer () includes a tungsten layer made of tungsten-based material. Piezoelectric layer () and the tungsten layer are layered together. The structure discussed above allows preventing a piezoelectric constant from lowering and a base-point voltage from varying. The lowering and the varying have been caused by a temperature-rise.

Electronic component and method for manufacturing the same

An upper adhesion layerformed between a piezoelectricity layerand an upper electrode layerso as to abut on the piezoelectricity layerand the upper electrode layeris included. The upper adhesion layerincludes a first tungsten layermade of tungsten in which an &#x3b1; phase and a &#x3b2; phase coexist and a second tungsten layermade of &#x3b1;-phase tungsten. The first tungsten layeris configured so as to abut on the piezoelectricity layer. It is possible to obtain a piezoelectric device which is capable of improving the adhesion property of both the piezoelectricity layer and the electrode layer and reducing a basic point voltage fluctuation at the time of high-temperature operation so as to improve reliability.

Piezoelectric device and its manufacturing method

An angular velocity sensor has a stable characteristic in which a vibration element has a small variation in the driving efficiency even when carbon dioxide gas is generated by the reaction with oxygen gas in a package including therein the vibration element. To realize this, the angular velocity sensor has a mixed gas of inert gas and oxygen gas in the package so that the mixed gas in the package has a pressure higher than the atmospheric pressure.

Angular velocity sensor and process for producing the same

An angular velocity sensor includes a tuning-fork-shaped substrate (), drivers () that are provided on the arms forming a tuning fork and vibrate the arms; monitors () for detecting vibrations generated by the drivers (); and detectors () for detecting displacement of vibrations made in application of an angular velocity. The drivers (), the monitors (), and the detectors () are made of a lower electrode layer, a piezoelectric thin film, and an upper electrode layer formed on the arms. The outer peripheral edge of the piezoelectric thin film is shaped like a step having at least one flat portion. The flat portion along the outer peripheral edge has no upper electrode layer formed thereon. This structure prevents short circuits between the lower electrode layer and the upper electrode layer.

Angular-velocity sensor

An electronic circuit is manufactured by the following method. Elements are formed on a front surface of a substrate, and then, a recess is formed around each of the elements in the front surface of the substrate. Then, a portion of the substrate is removed from a back surface of the substrate until reaching the bottom of the recess. In the method, the elements are separated at once by removing the portion of the substrate from the back surface, and thus, the elements are manufactured efficiently.

Method for manufacturing electronic component

An angular velocity sensor, which is able to reduce the variations of driving resonance frequency of the vibrator and to improve the reliability of the sensitivity of detection signal with respect to the angular velocity applied, is provided. The angular velocity sensor comprises a vibrator, and a tuning-fork as the vibrator is formed of a silicone substrate with crystal orientation (100) as its main face, and a side face nearly perpendicular to the driving direction (X direction) of the arm of the tuning-fork corresponds to a crystal orientation where the elastic modulus is less dependent on azimuth angle.

Angular velocity sensor

The present invention relates to a method of manufacturing a piezoelectric device of high sensitivity using direct bonded quartz plate. To achieve this object, the invented method comprises the steps of covalently bonding a plurality of quartz plates, dry etching the bonded quartz plates with plasma from one side of its surfaces down to a bonded plane, and dry etching with plasma thereafter from the other side of the surfaces.

Growing community of inventors

Fukui, Japan

Michihiko Hayashi