Valqua, Ltd.

Nippon Valqua Industries, Ltd.

Michi Kuroda

Ippei Nakagawa

Sangho Kim

Nobuhiro Yoshida

Sang Ho Kim

The present invention addresses a problem of providing a composite seal material that has performances, such as a vacuum sealing performance, plasma resistance, and corrosive gas resistance, in combination, that does not require a strong pressing force during use, that does not have a possibility of generating particles, and that is capable of maintaining the vacuum sealing performance for a long period of time. Characteristics of a solution to the problem is a composite seal material having an annular shape and including a first member and a second member adjacent to each other on left and right. The first member includes a seal body portion, and a lip portion extending from the seal body portion upwardly in the thickness direction of the composite seal material. The lip portion of the first member extends in an inclined orientation outwardly on a side opposite to the second member adjacent thereto.

Composite seal material

Provided is a composite seal member that can maintain performance such as vacuum seal performance, plasma resistance, and corrosive gas resistance over a long period. The composite seal member is mounted in a seal groove provided in a body surface of a first member, and establishes a sealed state between the first member and a second member when the second member is moved closer toward the first member. The composite seal member includes a first seal member disposed on the side of a first side wall of the seal groove and made of an elastic member, and a second seal member disposed on the side of a second side wall of the seal groove and made of a material that is harder than the first seal member. The second seal member has at least a second side wall abutment surface that extends generally in parallel with and makes surface contact with the second side wall of the seal groove, and a seal abutment surface that extends generally in parallel with a seal surface of the second member, and that makes surface contact with the seal surface of the second member in the sealed state.

Composite seal member

Composite seal member for semiconductor production apparatus

Composite seal

Growing community of inventors

Gojo, Japan

Michi Kuroda