Mems Optical, Inc.

Michele Banish

John Harchanko

Rodney L Clark

A slider system have been developed to aid in the spacing between read/write heads and the storage medium, and a grating antenna amplifier has been developed to improve illumination spot size and polarization characteristics. The grating antenna can be attached to a grayscale slider to obtain a distance between the illumination spot and antenna that lies in the near field region.

Optical disc head including a bowtie grating antenna and slider for optical focusing, and method for making

An anti-reflective structure is formed on a surface to transmit incident light with minimal losses. The anti-reflective surface has a plurality of protrusions having a feature size smaller than the wavelength of incident light. The protrusions increase in height in either a sloped linear manner or in a curvilinear manner, and the protrusions repeat across the surface in at least one dimension to transmit the incident light. Gray scale lithography may be used to produce these patterns of protrusions in photoresist layers. High fidelity transfer of the protrusion patterns into the surfaces is accomplished by utilizing, for example, an electron cyclotron resonance plasma. Transmission values at such patterned surfaces maybe as high as 99.3%.

Anti-reflective structures

A master wafer is replicated by creating a mold by plating a nickel electroform on a surface of a silicon wafer. Thereafter, a child wafer is prepared with a layer of photoresist or similar material that is compatible with plasma-etching techniques. Thereafter, the mold shape is transferred to the photoresist through compression molding, thereafter the child wafer is etched.

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Huntsville, AL, United States of America

Michele Banish