Ulis

Commissariat a L'energie Atomique

Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Commissariat a L'energie

Lynred

Michel Vilain

Benoît Dupont

Jean-Jacques Yon

Jean-Louis Ouvrier-Buffet

Antoine Dupret

Aurélie Touvignon

Astrid Astier

Laurent Frey

Alain Durand

Claire Vialle

Patrick Robert

Sébastien Cortial

Laurent Carle

Jérôme Favier

Christophe Minassian

Chantal Beccia

Benoit Dupont

Aurelie Touvignon

A method of manufacturing a detector capable of detecting a wavelength range [&#x3bb;; &#x3bb;] centered on a wavelength &#x3bb;, including: forming said device on a substrate by depositing a sacrificial layer totally embedding said device; forming, on the sacrificial layer, a cap including first, second, and third optical structures transparent in said range [&#x394;; &#x3bb;], the second and third optical structures having equivalent refraction indexes at wavelength &#x3bb;respectively greater than or equal to 3.4 and smaller than or equal to 2.3; forming a vent of access to the sacrificial layer through a portion of the cap, and then applying, through the vent, an etching to totally remove the sacrificial layer.

Method of manufacturing an infrared detector having a micro-cavity and a low refraction index step at an interface with a transparent cap, and associated infrared detector

A bolometric detection device includes a substrate having a read-out circuit. The device also includes an array of elementary detectors each including a membrane suspended above the substrate and connected to the read-out circuit by at least two electric conductors. The membrane has two electrically-conductive electrodes respectively connected to the two electric conductors, and a volume of transducer material electrically connecting the two electrodes. The read-out circuit is configured to apply an electrical stimulus between the two electrodes of the membrane and to form an electric signal as a response to said application. The volume includes a volume of a first transducer material electrically connecting the two electrodes of the membrane and forming walls of a closed enclosure having each of the electrodes at least partially housed therein; and a volume of a second transducer material, electrically connecting the two electrodes and housed in the enclosure, the electric resistivity of the second material being smaller than the electric resistivity of the first material; and the two transducer materials having a negative thermal coefficient of resistivity TCR.

Detection device with suspended bolometric membranes having a high absorption efficiency and signal-to-noise ratio

A method for detecting infrared radiation includes the steps of: providing a resistive bolometer retina including a plurality of resistive bolometers suspended above a substrate of a bolometric detector; acquiring the infrared radiation by the resistive bolometer retina to produce a plurality of raw read signals provided by the bolometers; correcting a response dispersion of the resistive bolometers in the raw read signals using a gain table, each gain of the gain table being associated with a bolometer of the resistive bolometer retina.

Method for correcting the drift of an infrared radiation detector comprising an array of resistive imaging bolometers and device implementing such a method

A method for detecting infrared radiation by using an array of bolometers. The following steps are used to read a bolometer of the array of bolometers: biasing the bolometer at a predetermined voltage in order to make current flow through the bolometer; subtracting a common-mode current from the current that flows through the bolometers; and producing a voltage by integrating the difference between the current that flows through the bolometers and the common-mode current.

System and method for detecting infrared radiation

An infrared detector including an array of detection bolometers each having a bolometric membrane suspended above a substrate, and associated with each bolometer: a detection branch, including the bolometer and a circuit performing a biasing according to a voltage set point, a compensation branch, including a compensation bolometer thermalized to the substrate, a circuit performing a biasing according to a voltage set point, an integrator for generating a voltage by integrating a difference between the currents flowing through said branches, a circuit generating a quantity depending on substrate temperature, including: a bolometer thermalized to the substrate, and a circuit for biasing the bolometer, and a circuit for generating the voltage set points according to said quantity. When the array is exposed to a uniform reference scene, the average of the differences between currents flowing through said branches is within the integrator dynamic range for a substrate temperature range from &#x2212;30&#xb0; C.-90&#xb0; C.

Bolometric detector with a temperature-adaptive biasing

This electromagnetic radiation detector consists of a plurality of elementary detection micro-sites, each including a micro-detector provided with a membrane () that is sensitive to the radiation in question and each being provided in a micro-cavity or micro-capsule defined by a substrate (), by an upper wall () used as a window that is transparent to said radiation and by side walls (), said membrane () being suspended above substrate () by means of at least two support arms () that include an electrically conducting layer (), with the ends of said arms () being anchored in side walls ().

Electromagnetic radiation detector with micro-encapsulation, and device for detecting electromagnetic radiation using such detectors

An infrared radiation detection device comprising: a substrate; a matrix of at least one line of elements for detecting the radiation, each comprising a resistive imaging bolometer, the matrix being formed above the substrate; a bolometer reading circuit, a temperature measuring device for measuring the temperature in at least one point of the substrate; and a compensation circuit and data processing device for correcting the signal formed from each bolometer as a function of the temperature measured in at least one point of the substrate. The compensation circuit and data processing device capable of correcting the signal formed from the imaging bolometer by using a predetermined physical model of the temperature behavior of the signal.

Device and method for detecting infrared radiation through a resistive bolometer matrix

A device for detecting infrared radiation comprising an array of bolometers for detecting radiation; and in order to read each bolometer, a signal shaping circuitry comprising: a circuitry capable of biasing the bolometer at a predetermined voltage in order to make current flow therethrough; a circuitry capable of generating a common-mode current; and a circuitry capable of integrating the difference between the current that flows through the bolometer and the common-mode current. According to the invention, the device comprises a circuitry capable of injecting current into each bolometer in order to shift its resistance by a predetermined quantity that depends on its offset, current injection being performed prior to readout biasing of the bolometer and the shift being performed according to the direction in which the bolometer's resistance varies as a function of temperature. In addition, correction circuitry is capable of shifting the resistances of bolometers towards a common value.

A detector for detecting electromagnetic radiation includes a substrate and at least one microstructure including a radiation-sensitive membrane extending substantially opposite and away from the substrate. The membrane is mechanically attached to at least two longilinear, collinear retention elements, at least one of which is mechanically connected to the substrate by an intermediate post. The membrane is in electrical continuity with the substrate. At least two collinear legs are attached to each other at the level of their ends which are attached to the membrane by a mechanical connector which is substantially co-planar with the legs and membrane. The other end of at least one of the legs is integral with a rigid cross piece which is substantially co-planar with the legs and extends substantially at right angles relative to the main dimension of the legs. The cross piece is integral with the post which is integral with the substrate.

Highly isolated thermal detector

A device for detecting infrared radiation including a matrix of resistive imaging bolometers above a substrate, a read circuit forming an analog electrical signal constituting an image of the infrared radiation impinging on the matrix, a probe for measuring the temperature of the substrate, an ADC for converting the analogue electrical signals from the read circuit and probe, and a data processing unit for correcting the signal formed by the read circuit according digital values NC(i,j) corresponding to electrical signals from the bolometers exposed to a uniform scene at the measured temperature of the substrate. The data processing unit including a unit for computing the digital values NC(i,j) based on a single set of parameters of a predetermined physical model of the read circuit electrical signals and corresponding to the exposure of the matrix of imaging bolometers to a temperature substantially equal to the measured substrate temperature.

A device for detecting infrared radiation including a resistive imaging bolometer intended to be electrically connected to a circuit for measuring a resistance of the imagine bolometer, whereby the device initially controls and adjusts the resistance of the imaging bolometer by injecting current into the imaging bolometer.

Device for detecting infrared radiation comprising a resistive imaging bolometer, a system comprising an array of such bolometers and a method for reading an imaging bolometer integrated into such a system

The invention relates to a device for detecting an electromagnetic radiation comprising a resistive imaging bolometer sensitive to the electromagnetic radiation to be detected, intended to be connected electrically to a signal shaping circuit, and a resistive common mode rejection bolometer that is associated electrically with the imaging bolometer, so that the current flowing through the common mode rejection bolometer is subtracted from the current flowing through the imaging bolometer, wherein it comprises means for controlling the resistance of the common mode rejection bolometer by injecting current therein.

Device for detecting an electromagnetic radiation comprising a resistive imaging bolometer, system comprising a matrix of such devices and method for reading an imaging bolometer of such a system

This electromagnetic radiation detector comprises a reflecting substrate and at least one detection element comprising a membrane sensitive to said radiation and suspended above the substrate. The distance between the membrane and at least one detection element and the substrate is variable, said distance having a predefined spatial distribution suitable for minimizing the rapid variations of a response of the radiation detector in at least one predefined wavelength range.

Electromagnetic radiation detector and method for manufacturing such a detector

A device for detecting electromagnetic radiation, especially infrared radiation, including an array of elementary bolometers which are sensitive to the incident radiation and are referred to as 'active' bolometers and an additional row of bolometers which are substantially insensitive to the radiation and are referred to as 'blind' bolometers. The active and blind bolometers are formed on a substrate in which a read circuit is produced for sequential addressing of each of the rows of the array and the row of blind bolometers, each of the bolometers in the same row being biased simultaneously. The read circuit includes a source for producing a reference current (I) on the basis of an additional blind bolometer which is also formed on the substrate and means of copying the reference current (I) to each of the columns of the array consisting of a current mirror.

Device for detecting electromagnetic radiation, especially infrared radiation

The invention relates to a passive microbolometer (), comprising a reflective screen () and a suspended membrane with the function of radiation absorber, thermometer and electrical connection. The membrane is supported by at least two anchor elements () fixed to a support substrate (). The reflective screen () may be embodied by at least one layer () of metallic material with a thickness of the order of 500 &#x212b; to 2000 &#x212b;. The screen () is arranged beneath the membrane in electrical contact with the membrane absorber element () such as to reduce the area resistance of the unit made up of the screen () and the absorbing element () and to avoid the absorption of radiation by the latter.

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Saint Georges de Commiers, France

Michel Vilain