Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno

Asml Netherlands B.v.

Michel Van Putten

Hans Jansen

Erwin John Van Zwet

Norbertus Benedictus Koster

Diederik Jan Maas

Evert Nieuwkoop

Ariël De Graaf

Anthonius MCP De Jong

Ronald HG Kramer

Paul Blom

Martinus HA Leenders

A radiation sensor device is disclosed for use with a radiation source, capable of emitting radiation with photon energies larger than the work function of the target comprising a target plate to be impacted by the radiation to generate photo-electrons, the target plate being electrically isolated from a shielding electrode. The shielding electrode is arranged to collect energy-filtered photo-electrons from the target plate, using an electrostatic barrier for the filtering. The target plate is constructed of a carbon material. A current measurement device is operative to keep the target plate at a preset voltage difference with respect to the shielding electrode and measure a photo-electron deficit current as a result of radiation impact on the target plate.

Radiation sensor device for high energy photons

Growing community of inventors

's-Gravenhage, Netherlands

Michel Van Putten