Commissariat a L'energie Atomique

S.o.i. Tec Silicon on Insulator Technologies, S.a.

Santrade, Ltd

La Calhene, Inc.

Physique & Industrie

Soitec

Michel Roche

Claude Etievant

Philippe Fontcuberta

Joel Frehaut

Gerard Raboisson

Charles Bruno

An electron gun includes a sealed chamber under vacuum. A cathode having an emitting face is placed inside the chamber. An anode forms a sealed window, formed facing the emitting face in one of the walls of the chamber. The anode is capable of allowing electrons emitted by the emitting face to pass through. A biasing apparatus sets up a voltage between the anode and the cathode, capable of accelerating these electrons towards the anode, the electrons thus accelerated forming a beam that passes through the anode. The anode and the emitting face each have a curvature, the curvature of the anode making it capable of resisting a pressure difference between the inside and the outside of the chamber and being designed to cooperate with the curvature of the emitting face to focus the electron beam outside the chamber.

Electron gun with a focusing anode, forming a window for said gun and application thereof to irradiation and sterilization

An apparatus for cutting at least one thin layer from a substrate or ingot forming element for an electronic or optoelectronic or optical component or sensor. This apparatus includes a device for directing a pulse of energy into the substrate or forming element wherein the pulse has a duration shorter than or of the same order as that needed by a sound wave to pass through the thickness of the weakened zone, and the energy of the pulse is sufficient to cause cleavage to take place in the weakened zone as the energy of the pulse is absorbed therein. The apparatus also includes an assembly for holding or orienting the substrate or ingot forming element so that the energy pulse is completely uniformly directed over the entire surface, through the face and into the substrate or ingot forming element to cause cleavage to take place in the weakened zone as the energy of the pulse is absorbed therein.

Cutting thin layer(s) from semiconductor material(s)

A method of cutting at least one thin layer from a substrate or ingot forming element for an electronic or optoelectronic or optical component or sensor. This method includes the steps of forming a weakened zone in the substrate or ingot forming element, wherein the weakened zone has a thickness that corresponds to that of the layer that is to be removed; and directing a pulse of energy into the substrate or forming element wherein the pulse has a duration shorter than or of the same order as that needed by a sound wave to pass through the thickness of the weakened zone. The energy of the pulse is sufficient to cause cleavage to take place in the weakened zone as the energy of the pulse is absorbed therein.

Apparatus for the manufacture of solid particles from a flowable mass

An electron accelerator for accelerating a first electron beam includes a resonant cavity, a source of electromagnetic energy for supplying the resonant cavity at a resonant frequency of the resonant cavity and for forming a second electron beam and injecting the second electron beam into the resonant cavity. The second electron beam is decelerated by the electromagnetic fields of the resonant cavity and the first electron beam is in phase opposition to the second electron beam.

Resonant cavity electron accelerator

Electrostatic accelerator includes an accelerating column (20), a high voltage terminal (18) located at one end of said accelerating column and electric charge transport means, said transport means incorporating a high frequency accelerator such as a high frequency electron accelerator (54) able to supply an electron beam and means (56) for supplying the electron beam to the high voltage terminal, said electric charges being constituted by the electrons supplied by said high frequency accelerator.

Electrostatic accelerator and free electron beam laser using the

An electric pulse generator for the formation of high power electric pulses. The generator includes a capacitor having coaxial electrodes and a coaxial electrode shaping line. Magnetic compression means include the capacitor for charging the shaping line and a magnetic switch with a saturable inductor for discharging the shaping line. This arrangement reduces parasitic inductances and provides a generator having a compact, simple structure which is less expensive than known generators.

Electric pulse generator of the saturable inductor type

Electric pulse generator having at least one capacitor in the form of a coaxial line section and a saturatable inductance coil serving as a switch. According to the invention, the saturatable inductance coil is located within the internal conductor of the coaxial line.

Electric pulse generator of the type with a saturatable inductance coil

An electron gun printer, having an electrically insulating vacuum enclosure, in which is located the gun, which gun emits an electron beam to a printing medium outside the enclosure, a focussing anode for modulating the intensity of the beam, deflecting coils or plates controlling an alternating movement of the beam to scan the lines of the printing medium, motor-driver rollers for controlling a displacement of the printing medium and a clock for synchronizing the anode and deflecting coils. One enclosure wall has at least two rows of windows arranged in staggered manner parallel to the scanned lines and respectively sealed by conductive plates, which are transparent to the electrons. The printer also includes plates or coils for deflecting the beam so that the beam alternately scans each row of windows during the displacement of the medium.

Electron gun printer having window-sealing conductive plates

The invention relates to an apparatus for irradiating material by an electron beam. The apparatus comprises guidance means for placing the material on the path of the beam, an electron gun provided in a tight enclosure having a shape with a symmetry or revolution with respect to an axis, an electron-emitting filament located in the axis of the enclosure, as well as a Wehnelt electrode surrounding the filament. It is provided with a first circular slot for concentrating electrons in the vicinity of the said slot and an electron accelerating electrode surrounding the Wehnelt electrode and having a second circular slot facing the first slot. The enclosure comprises a tightly closed circular window which is transparent to the electrons and which faces the two slots.

Apparatus for irradiating material by an electron beam

The invention relates to a miniature magnetic spectrometer with a coaxial structure. This spectrometer, associated with a particle generator, comprises a transformer producing a magnetic field for deflecting the charged particles injected at one end of the spectrometer body. The transformer is provided with a secondary circuit, constituting the spectrometer body, formed by an external conductor in short-circuit with an internal conductor and coaxial to the external conductor. These two conductors define an annular space in which can move the charged particles. Means for detecting the deflected particles, disposed at a second end of the spectrometer body, means for selecting the particles in accordance with their injected angle and a converter element for the particles placed in the annular space level with the first end also being provided.

Coaxial miniature magnetic spectrometer

The invention relates to a process for measuring a continuous neutron flux, and to an measuring apparatus for carrying out this process. According to the invention, a probe is disposed in the neutron flux, comprising a first part defining an enclosure and a second part disposed inside the enclosure and separated therefrom by a medium whose heat conductance is known, one of said parts being made at least partially of fissile material, and the difference in temperatures between the two parts is measured at equilibrium, to deduce therefrom the power released by the fissile material, then the neutron flux. The invention is more particularly applicable to measuring the neutron flux, particularly in the core of nuclear reactors.

Growing community of inventors

Dijon, France

Michel Roche