Nikon Corporation

Kla Corporation

Muratec Automation Co., Ltd.

Nikon Research Corporation of America

Michel Pharand

Patrick S Chang

Theodore W Rogers

Michael B Binnard

Daniel Gene Smith

Alexander H Cooper

Eric Peter Goodwin

David Michael Williamson

Michael Krolak

Chetan Mahadeswaraswamy

Alec Paul Robertson

Johnathan Marquez

Matthew Rosa

Jonathan Kyle Wells

Brian L Stamper

Roumen Iliev Deyanov

Matthew D Rosa

Pedro Reynoso-Mora

Methods and systems for realizing a high speed, rotating anode based x-ray illumination source suitable for high throughput x-ray metrology are presented herein. A high speed rotating anode includes a water cooled rotating platen supported by radial and thrust air bearings employing cascaded differential pumping. A very high bending stiffness of the rotating assembly is achieved by spacing radial air bearings far apart and locating a rotary motor and thrust bearings between the radial air bearings. The high bending stiffness increases the mechanical stability of the rotating assembly during high speed operation, and thus decreases vibration at the location of impingement of the electron beam on the rotating anode material. In some embodiments, magnetic thrust bearings are employed and the air gap is controlled to maintain a desired gap over an operational range of up to three millimeters.

Water cooled, air bearing based rotating anode x-ray illumination source

An actuator assembly () for moving a device () includes a stator component (), a mover component (), a measurement system (), and a signal processor (). The measurement system () includes (i) a magnet assembly () that is coupled to and moves with the mover component (); and (ii) a plurality of spaced apart sensors (A). The magnet assembly () produces a magnetic field (B) that moves relative to the stator component () as the mover component () moves along a mover axis (C). Each sensor (A) is a transducer that generates a sensor signal that varies its output voltage in response to the changing magnetic field (B) from the magnet assembly () as the mover component () is moved relative to the sensors (A). The signal processor () receives the sensor signals and estimates a position of the mover component () along the mover axis (C) based at least in part on the sensor signals.

Actuator assembly including magnetic sensor system for vibrationless position feedback

A rotary probe head having a dual interface for probe mounting that allows two separate interfaces to be mounted on opposite sides of the 'A' or elevation axis of the rotary probe head. The two interfaces can be rotatable and interchangeable and allow for increased flexibility in handling different types of attachments including attachments having widely different mass, size, and/or interface connections. A probe can be mounted to one interface and a counterweight can be mounted to the opposite interface for improved holding torque performance by reducing the duty force and heat factor generation of the motor in the probe head.

Rotary probe head

A stage assembly () that includes (i) a stage () that retains a device (); (ii) a reaction assembly () that is spaced apart from the stage (); (iii) a stage mover () that moves the stage (), the stage mover () including a magnet array () that is coupled to the stage () and a conductor array () that is coupled to the reaction assembly (); (iv) a temperature adjuster (); and (v) a control system () that selectively controls the temperature adjuster (). The conductor array () includes a set of first zone conductor units (), and a set of second zone conductor units (). The temperature adjuster () independently adjusts the temperature of the set of first zone conductor units (), and the set of second zone conductor units ().

System and method for controlling a temperature of a reaction assembly

An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The optical assembly comprises catadioptric optics configured to fold the optical path of the pointing beam and measurement beam that are being directed through the outlet of the system, to compress the size of the optical assembly.

Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure

A conveyor system includes a cartridge, which defines a section of the conveyor. In one embodiment, the cartridge includes a number of wheels, which are designed as a unit for a conveyor section and the wheels of the cartridge are designed to hold a belt. A conveyor section, in one optional embodiment, includes integrated sensors for detecting the presence of a container (e.g., FOUP), and each conveyor section can implement precision sheet metal rails that facilitate high speed FOUP transport. In one embodiment, each conveyor section has two sides. Each side has a cartridge that has a belt. In particular embodiments, one side of the conveyor section includes a drive motor, that drives the conveyor.

Direct drive modular belt conveyor, cartridge, and quick connect-disconnect constant velocity drive shaft, for high speed FOUP transport

Growing community of inventors

Los Gatos, CA, United States of America

Michel Pharand