Forschungszentrum Julich Gmbh

Michel Marso

Michael Gotz Berger

Hans L&uuml;th

Michael Kr&uuml;ger

Markus Th&ouml;nissen

Hans Luth

R&uuml;diger Arens-Fischer

Andreas Schuppen

Dirk Hunkel

Herbert Munder

An optical silicon-based detector with a porous filter layer that has a laterally modifiable filter effect, comprising a plurality of integrated photosensitive cells. The invention also relates to a method for the production of an optical detector by creating an insulating layer on the porous filter layer and by providing active filter surfaces.

Optical detector with a filter layer made of porous silicon and method for the production thereof

A multiplicity of components form a photodiode array on a substrate. Each of the components consists of a transistor of the p-n-p type with the outermost p-doped layer being transformed into an optical filter by control of the anodic etching operation utilizing transistor characteristics of the respective transistor. The result can provide red, blue and green filters in a color camera.

Process for making a color selective Si detector array

Color-selective SI detector array

Layered system with an electrically activatable layer

Growing community of inventors

Jülich, Germany

Michel Marso