Commissariat a L'energie Atomique

Michel Darboux

Jean-Marc Dinten

Rosolino Lionti

Gilles Grand

Frederic Moisan

The image of an object is improved by estimating the scattered radiation that it transmits to the detectors. To achieve this, one uses the scattered radiation effectively measured through an imitation of the object, having analogous attenuation properties, and which one modifies by the weighting coefficients obtained by a transformation of the values of the total radiation received through the object () and the selected imitation (). One thus manages to improve the image without subjecting the object to a double irradiation in order to measure the scattered radiation separately. The principal applications are tomography, bone densitometry and non-destructive controls.

Method for estimating a scattered radiation, particularly to correct tomography or bone densitometry measurements

The radiography of a subject is improved by estimating the scattered radiation it transmits to the detectors. For this, one uses scattered radiation measured effectively through a simulacrum of the subject, with analogous attenuation properties, and which are modified by weighted coefficients obtained through a transformation of the values of total radiation received through the subject ( ) and the simulacrum ( ) selected. Thus it is also possible to improve radiographs without double irradiation of the subject to measure the scattered radiation separately.

Method for estimating scattered radiation, in particular for correcting radiography measurements

Process for the correction of scattering in digital X-ray images

A process for synthesizing a reference image of an object by applying real image characteristic element data to characteristic elements of a descriptive (CAD based generated) image. The process includes preprocessing the descriptive image data by identifying characteristic elements of the object in the descriptive dam and determining the coordinates of the characteristic elements. The first format of the descriptive image data and the coordinates of the characteristic elements are subsequently changed to an equivalent descriptive image and equivalent coordinates of the characteristic elements having a second format. The process also includes the acquisition of at least one real image of the object defined in the second format; sampling at least one characteristic element of the real image of the object; centering and preshifting the samples of the object with respect to the second format and applying the obtained centered and preshifted samples of the real image to the equivalent characteristic elements of the descriptive image.

Process for producing a synthesized reference image for the inspection

The process consists of producing a first binary image (104) from descriptive data of an integrated circuit (or another type of object) to be inspected, the data being stored in a data base (102). Real images of characteristic elements of the integrated circuit to be inspected are then acquired (200) and processed so as to be applicable (300) to the binary image, as a function of their associated positions. A this obtained synthesis image is considered as a reference image with which are compared the images of the circuits to be inspected. This process is applicable to numerous types of industrially produced objects requiring a very precise inspection.

This invention concerns a method for optimizing contrast in an image of a sample. This sample (5) comprises a whole number of zones having different reflection or transmittance factors. These zones are illuminated by a light source (7) and the image is obtained at the output of an optical system (4) to be analyzed by a sensor (10) supplying on the outputs recording signals of this image. Contrast optimization consists of determining the characteristics of an optimal fiber to be inserted between the source (7) and the sample (5) to be controlled. Application in particular for the control of in-production integrated circuits.

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Grenoble, France

Michel Darboux